초록
In this paper we report on the electrical properties of carbon fiber which is an attractive material for strain gauges and can also be applied to resonating micro sensors. The carbon fibers used in this research was manufactured from polyactylonitrile (PAN). The fabricated carbon fibers had about $10\;{\mu}m$ in length and several centimeters in length. We employed a micro structure to measure electrical properties of the carbon fiber. The measured electrical resistivity of the carbon fibers were about $3{\times}10^{-3}{\Omega}{\cdot}cm$ A gauge factor of the carbon fiber is also observed with the same system and it was about 400, depending on the structure of the carbon fiber. For the sensor applications of the carbon fiber, it is selectively placed between the gap of Al electrodes using a dielectrophoresis method. When the carbon fiber is resonated by a piezoelectric ceramic, resistance change at a variety of resonance mode was observed through an electrical system.