대한기계학회논문집A (Transactions of the Korean Society of Mechanical Engineers A)

  • 제31권10호
  • /
  • Pages.993-998
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  • 2007
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  • 1226-4873(pISSN)
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  • 2288-5226(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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머신 비젼을 이용한 2축 스테이지의 마이크로 원형 궤적 실시간 측정 및 분석

Real-time Measurement and Analysis for Micro Circular Path of Two-Axes Stage Using Machine Vision

  • 김주경 (충북대학교 대학원 기계공학부) ;
  • 박종진 (충북대학교 대학원 기계공학부) ;
  • 이응석 (충북대학교 기계공학부)
  • 발행 : 2007.10.01
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초록

To verify the 2D or 3D positioning accuracy of a multi-axes stage is not easy, particularly, in the case the moving path of the stage is not linear. This paper is a study on a measuring method for the curved path accurately. A machine vision technique is used to trace the moving path of two-axes stage. To improve the accuracy of machine vision, a zoom lens is used for the 2D micro moving path. The accuracy of this method depends of the CCD resolution and array align accuracy with the zoom lens system. Also, a further study for software algorithm is required to increase the tracing speed. This technique will be useful to trace a small object in the 2D micro path in real-time accurately.

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참고문헌

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