• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.22 no.5
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• pp.845-851
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• 2013

In this paper, a robust optimization approach is applied to the two-axes stage using a piezoelectric actuator for precise motion tracking. Robust control is based on LQG/LTR (linear quadratic Gaussian control with loop transfer recovery) control. Further, an LMI (linear matrix inequality) is used to find the optimal parameter in the loop transfer recovery step, instead of a trial and error method. A decoupler in the shape of FIR filter is added to reduce the coupling effect between the motions of the two axes, and hence, the feedback control loop is designed independently for each axis motion. The experimental result shows that the proposed control scheme can be applied effectively for motion control of the two-axes stage.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.31 no.10
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• pp.993-998
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• 2007

To verify the 2D or 3D positioning accuracy of a multi-axes stage is not easy, particularly, in the case the moving path of the stage is not linear. This paper is a study on a measuring method for the curved path accurately. A machine vision technique is used to trace the moving path of two-axes stage. To improve the accuracy of machine vision, a zoom lens is used for the 2D micro moving path. The accuracy of this method depends of the CCD resolution and array align accuracy with the zoom lens system. Also, a further study for software algorithm is required to increase the tracing speed. This technique will be useful to trace a small object in the 2D micro path in real-time accurately.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.9 no.6
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• pp.51-58
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• 2010

This paper suggests a control technique of the two axes precision stage. The stage is supported by four flexible spring hinges and driven by two piezoelectric actuators. The dynamic motion of the stage is analysed by the finite element method and identified by the frequency domain modeling technique based on the experimental data. The sliding mode control with integrator is applied to improve the tracking ability of the stage to the complex reference input signal. Experimental results demonstrate that the proposed modeling schemes and control algorithm can be used effectively for the two axes stage.

• International Journal of Precision Engineering and Manufacturing
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• v.1 no.1
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• pp.91-97
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• 2000

Anisotropic work hardening of cold rolled low carbon steel sheets is studied. The experiments consist of two stage tensile prestraining and tensile tests. At the first prestraining, steel sheets are streteched along the rolling direction by 3% and 6% tensile strains. The second prestrains are at 0${\cric}$, 30${\cric}$, 60${\cric}$to the rolling directions by varying degrees. Tensile tests are performed on the specimens cut from the sheets after the two stage prestraining. A theoretical framework on anisotropic hardening is proposed which includes Hill's quadratic yield function, ziegler's kinematic hardening rule, and Kim and Yin's assumption on the rotation of orthotropy axes. The predicted variations of R-values with second stage tensile strain are compared with the experimental data.

• Journal of the Korean Society of Manufacturing Process Engineers
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• v.10 no.4
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• pp.102-108
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• 2011

LQG/LTR control scheme is applied to the two axes stage using piezoelectric actuator for tracking reference input and suppressing hysteresis effect in this paper. The plant is combined with an integrator to improve the tracking ability. LQG/LTR controller is designed by making desirable target filter loop remove all poles except for an integrator included in new design plant model and loop transfer recovery. Decoupler in the shape of FIR filter is added to remove the coupling effect between the two axes motion and so feedback control loop is designed independently for the each axis motion.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2012.04a
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• pp.212-213
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• 2012

• Aerospace Engineering and Technology
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• v.13 no.1
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• pp.44-54
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• 2014

This paper suggests two kinds of reaction control system command generation methods for upper stage attitude control of launch vehicles. The reaction control system is assumed to consist of two sets of three nozzles. One operation technology is based on mixed attitude error functions, and the other is based on command mixing functions. Both are compared via simulations. The simulation results show that the latter is comparatively preferable in terms of interference among control axes, independency of controller design and analysis among axes, and prediction of flight performance of each control axis.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2012.10a
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• pp.179-180
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• 2012

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.568-571
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• 2005

This paper introduces a correlation-based surface matching algorithm that can be used to reconstruct the surface topography of an object that is scanned from multiple overlapping regions by an AFM. The image matching technique is applied to two neighboring images intentionally overlapped with each other. To account for the inaccuracy of the coarse stage implemented in AFM, all the six axes including the rotational degrees of freedom are successively matched to maximize the correlation coefficient. The results show that the proposed 6-axes image matching method is useful for expanding the measurement range of AFM.

• Journal of Institute of Control, Robotics and Systems
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• v.12 no.8
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• pp.798-804
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• 2006

To overcome the limited relative uncertainty and work range of the existing planar stage and the bulk structure of the contact-less motor for rotation, the novel operating principle to realize the precise rotation is suggested. It uses the two-axial vector forces, normal force and thrust force, of three-induction type of axial motors located $120^{\circ}$ apart, resulting in the contact-free rotation of the mover. Firstly in this paper, the magnetic forces across the air gap are modeled and simulated under the various conditions. It clarifies the feasible range of the derived solution. And the algorithm compensating the strong cross couple between the forces and the control inputs; generally AC magnitude and slip frequency, is given to realize the independent control of six axes. Finally, for the successfully implemented system, the round test and the micro step test results are given.