LCD Photo-mask Using Commercial LCD Panel

상용 LCD 패널을 이용한 광 마스크 제작

  • 이승익 (명지대학교 전자공학과) ;
  • 고정현 (명지대학교 전자공학과) ;
  • 이상영 (명지대학교 전자공학과) ;
  • 박장호 (명지대학교 전자공학과) ;
  • 소대화 (명지대학교 전자공학과)
  • Published : 2007.03.31

Abstract

Photo-lithography lies in the middle of the wafer fabrication process. It is often considered as the most critical step in the IC process. We use a mask in exposure steps of the photo-lithography. Typically, 20 to 25 different levels of masks are required to complete an IC device. That means, if a photo process can be developed with the use of only one photo mask, we can reduce more process cost. To satisfy this, we plan to develop an alternative photo mask. For this reason, we chose to use a LCD. We expect to develop a LCD panel that can be changed by electrical control. This is the main idea about the adjustive photo mask. The Photo mask made of LCD panel will replace the former one.

Keywords

References

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