Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
권호 표지

Stage System for LCD Exposure Equipment Using Touch-type Displacement Sensor

접촉형 변위센서를 이용한 LCD노광기용 스테이지 시스템

  • Yim, Kwang-Kuk (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Seo, Hwa-Il (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Cho, Hyun-Chan (Dept. Of Electrical and Electronic Engineering, Korea University of Technology and education) ;
  • Kim, Kwang-Sun (Dept. of Mechatronic Engineering, Korea University of Technology and education) ;
  • Kang, Heung-Seok (Dept. of Exosure system, Opto Fintech CO., LTD)
  • 임광국 (한국기술교육대학교 전기전자공학과) ;
  • 서화일 (한국기술교육대학교 전기전자공학과) ;
  • 조현찬 (한국기술교육대학교 전기전자공학과) ;
  • 김광선 (한국기술교육대학교 메카트로닉스공학과) ;
  • 강흥석 ((주)오에프티)
  • Published : 2007.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

In an effort to reduce weaknesses of existing laser displacement sensor-based system, a sensing device for distance and balance of mask-substrate gap using touch-type displacement sensor was suggested. The device suggested in this study is expected to solve the problems of prices and reflections, by means of a touch-type sensor. LCD exposure equipment stage system including suggested sensing device was realized to assess the characteristics of sensing the balance and gap between mask and substrate. It was verified that a touch-type displacement sensor-based device to adjust the balance and distance of mask-substrate gap suggested in this study can be applicable to LCD expose equipment in practice.

Keywords