Journal of the Korean Society of Industry Convergence (한국산업융합학회 논문집)
- Volume 10 Issue 3
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- Pages.179-185
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- 2007
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- 1226-833X(pISSN)
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- 2765-5415(eISSN)
A Study on the Fracture Behavior of Quartz Glass(I)
석영 유리의 파괴 거동에 관한 연구(I)
-
Choi, Seong-Dae
(School of Mechanical Engineering, K.I.T)
;
-
Cheong, Seon-Hwan
(School of Mechanical Engineering, K.I.T)
;
-
Jeong, Young-Kwan
(School of Mechanical Engineering, K.I.T)
;
- Kim, Gi-Man (School of Mechanical Engineering, K.I.T) ;
- Hong, Yong-Bae (School of Mechanical Engineering, K.I.T)
- Received : 2007.05.10
- Accepted : 2007.08.24
- Published : 2007.08.31
Abstract
Quartz glass are used in semiconductor industries as the reaction furnace, wafer carrier and accessaries. During the process the quartz glass received compression by direct contact with other quartz glass ware and metal as the form of weight itself and vacuum pressure and fatigue by vibrations caused by process. Even as the other ceramic materials quartz glass have high compressive strength but often there happened crack and breakage of quartz glass resulted in a great damage in the process. In this paper investigation will be carried out on fracture behavior of quartz glass under local load to give guideline to prevent unintended fracture of quartz glass.