Transactions on Electrical and Electronic Materials

  • 제8권2호
  • /
  • Pages.89-92
  • /
  • 2007
  • /
  • 1229-7607(pISSN)
  • /
  • 2092-7592(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
권호 표지
DOI QR코드

DOI QR Code

The Properties of HfO2 Thin Films by DC/RF Magnetron Sputtering and Thermal Evaporation Method

  • Jeong, Woon-Jo (Optical Engineering Research Institute, Mokpo National University) ;
  • Ahn, Ho-Geun (Department of Chemical Engineering, Sunchon National University) ;
  • Kim, Young-Jun (Department of Electrical Engineering, Mokpo National University) ;
  • Yang, Hyeon-Hun (Department of Electrical Engineering, Mokpo National University) ;
  • Park, Gye-Choon (Department of Electrical Engineering, Mokpo National University)
  • 발행 : 2007.04.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

$CuInSe_2$ thin film were prepared in order to clarify optimum conditions for growth of the thin film depending upon process, and then by changing a number of deposition conditions and heat treatment conditions variously, structural and electrical characteristics were measured. Thereby, optimum process variables were derived. For the manufacture of the $CuInSe_2$, Cu, In and Se were deposited in the named order. Among them, Cu and In were deposited by using the sputtering method in consideration of their adhesive force to the substrate, and the DC/RF power was controlled so that the composition of Cu and In might be 1:1, while the annealing temperature having an effect on the quality of the thin film was changed from $200\;^{\circ}C$ to $350\;^{\circ}C$ at intervals of $50\;^{\circ}C$.

키워드

참고문헌

  1. M. A. Contreras, B. Egass, K. Ramanathan, J. U. Hiltner, A. Swartzlander, F. Hasoon, and R. Noufi, 'Prog. In Photovoltaics', Short Communication, p 35, 1999
  2. F. H. Kang, 'Development and Manufacturing of CIS Thin Film Solar Modules', Technical Digest of the Int'l PVSEC-11, Hokkaido, Japan, p. 627, 1999
  3. F. O. Adurodija, M. J. Carter, and R. Hill, 'Solidliquid reaction mechanisms in the formation of high quality CulrrSe, by the stacked elemental layer (SEL) technique', Solar Energy Materials & Solar Cells, Vol. 37, p. 203, 1995
  4. R. Noufi, R. L. Matson, R. C. Powell, and C. Harrington, 'Solar Cell', p. 479, 1986
  5. S. Zweigart, D. Schmid, J. Kessler, H. Dittrich, and H. W. Schock, 'Studies of the growth mechanism of polycrystalline Culnxe, thin films prepared by a sequential process', Journal of Growth, Vol. 146, p. 233, 1995
  6. S. Yamanaka, M. Konagai, and K. Takahashi, 'Characterization of copper indium diselenide thin films by raman scattering spectroscopy for solar cell applications', Japanese Journal of Applied Physics, Vol. 28, No.8, p. L1337, 1989 https://doi.org/10.1143/JJAP.28.1989
  7. K. Bindu, C. Sudha Kartha, and K. P. Vijayaumar, 'Culnxe, thin film preparation through a new', Solar Energ, Vol. 79, p. 67,2003
  8. L. Zhang, F. D. Jiang, and J. Y. Feng, 'Formation of $CulnSe_{2}$, thin films on flexible substrates by electrodeposition (ED) technique', Solar Energy Materials&Solar Cells, Vol. 80, p. 483, 2003 https://doi.org/10.1016/j.solmat.2003.06.014
  9. T. Pisarkiewicz and H. Jankowski, 'Vacuum selenization of metallic multilayers for CIS solar cells', Vacuum, Vol. 70, p. 435, 2003 https://doi.org/10.1016/S0042-207X(02)00683-8
  10. Xs. Mrsillac, S. Dorn, R. Rodheleau, and E. Miller, 'Low-temperature deposition of $Cu(InGa)Se_{2}$ solar cells on various substrates', Solar Energy Materials & Solar Cells, Vol. 82, p. 45, 2004 https://doi.org/10.1016/j.solmat.2004.01.004
  11. C. J. Huang, T. H. Meen, M. Y. Lai, and W. R. Chen, 'Formation of Culnxe, thin films on flexible substrates by electrodeposition (ED) technique', Solar Energy Materials & Solar Cells, Vol. 82, p. 553,2004
  12. H. Miyazakia, R. Mikamia, A. Yamadab, and M. Konagaia, $Cu(In,Ga)Se_{2}$ thin film absorber with high Ga contents and its application to the solar cells', Journal of Physics and Chemistry of Solids, Vol. 64, p. 2055, 2003 https://doi.org/10.1016/S0022-3697(03)00204-X
  13. J. Bekker, V. Alberts, and M. Witcomb, 'Influence of selenization techniques on the reaction kinetics of chalcopyrite thin films', Thin Solid Films, Vol. 387, p. 40, 2001

피인용 문헌

  1. Effect of Annealing Temperature on CuInSe2/ZnS Thin-Film Solar Cells Fabricated by Using Electron Beam Evaporation vol.2013, 2013, https://doi.org/10.1155/2013/568904