초록
A linear ultrasonic motor was designed by a combination of the longitudinal and bending mode. linear ultrasonic motors are based on an elliptical motion on the surface of elastic body, such as bar or plates. The corresponding eigen-mode of one resonance frequency can be excited twice at the same time with a phase shift of 90 degrees in space and time. That is excite symmetric and anti-symmetric modes. Then it determines the thrust and speed of the motor. Linear ultrasonic motors are investigated experimentally in according to be fabricated a general classification to motor structure and material characteristic. There was the first to simulate as use of finite element analysis ANSYS 9.0. The AL-T2W8-ARM14-LEG18-ANGLE80 motor has a maxim efficiency 18 % under the speed 0.14 m/s, thrust 345 gf and preload 280 gf, operating frequency is 57.6 kHz.