패턴드 미디어 제작을 위한 나노 사출성형 공정에 관한 연구

Nanoinjection Molding Process with Passive Heating System for Patterned Magnetic Media

Perpendicular patterned magnetic media have been regarded as a prime candidate to achieve an ultra-high magnetic recording density of over 1 Tera-bits/$inch^2$. Patterned magnetic media with nanoscale patterns have been fabricated using various nanopatterning technologies. We focused on the two technical issues of nanoinjection molding technology. Firstly, we have investigated a cost-effective method to fabricate metallic stamps. Secondly, we focused on the analysis of nanoinjection molding with passive heating, where the replication of 50 nm nanopillar arrays was successful. The effect of the thermal insulation layer on the replication quality was examined by analytical and experimental methods. Finally, we deposited a magnetic layer on a injection molded nanopillars and measured. Our methodology can provide cost-effective mass-production for patterned magnetic media.