Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Development of Adhesion Force Measurement Apparatus with High Stiffness and High Resolution

고탄성 고분해능을 갖는 응착력 측정장치의 개발

  • Published : 2007.03.01
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Abstract

To understand adhesive phenomena, we need to get force curve between two surfaces. And it is said that high stiffness force analysis system is needed to get precise force curve and more information of the surfaces. Usually the stiffness of the force measurement system is under the order of 10N/m. The stiffer force measurement system, however, results in more information on the surface, because higher stiffness lead to the wider range of force curves, secondly because the force curve obtained through the stiffer one describes more precise relationship between relative tip-sample separation and interaction force. In this paper, considering for stiffness and resolution, the cantilever was designed and we made adhesion force measurement apparatus with high stiffness and high resolution, so we measured adhesive force between Ag-ball and wafer.

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References

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