Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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A novel miniature condenser microphone with a hinge diaphragm

힌지구조를 갖는 초소형 콘덴서 마이크로폰

  • Kim, Hye-Jin (IT convergence & Components Laboratory, ETRI) ;
  • Lee, Sung-Q (IT convergence & Components Laboratory, ETRI) ;
  • Park, Kang-Ho (IT convergence & Components Laboratory, ETRI)
  • 김혜진 (한국전자통신연구원, IT 융합부품연구소) ;
  • 이성규 (한국전자통신연구원, IT 융합부품연구소) ;
  • 박강호 (한국전자통신연구원, IT 융합부품연구소)
  • Published : 2007.05.31
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Abstract

This paper presents a novel, highly sensitive condenser microphone with a flexure hinge diaphragm. We used the finite-element analysis (FEA) to evaluate the mechanical and acoustic performance of the condenser microphone with a hinge diaphragm. And we fabricated the miniature condenser microphones with area of 1.5 mm${\times}$1.5 mm. From the simulation results, we confirmed that the maximum displacements at the center of flexure hinge diaphragms are several hundred times, compared with flat diaphragms. The sensitivities of fabricated miniature microphones are about $12.87{\mu}V/Pa$ at 1 kHz under a low bias voltage of 1 V, and the frequency response is flat upto 13 kHz.

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References

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