한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제23권8호
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  • Pages.163-170
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  • 2006
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

표면미세가공시 발생하는 MEMS 구조물의 변형 억제

Alleviating Deformation of MEMS Structure in Surface Micromachining

  • 홍석관 (한국생산기술연구원, 정밀금형팀) ;
  • 권순철 (삼성종합기술원) ;
  • 전병희 (인덕대학 컴퓨터응용설계학과) ;
  • 신형재 (삼성종합기술원)
  • 발행 : 2006.08.01
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초록

By removing sacrificial layer through ashing process, movable MEMS structure on substrate can be fabricated in surface micromachining. However, MEMS structure includes, during the ashing process, the warping or buckling effects due to stress gradient along the vertical direction of thin film. In this study, we presented method for counteracting the unwanted deflection of MEMS structure and designed using character of deposit process to overcome limited design conditions. Unit cell patterns were designed with character of deposit shape, and their final shapes were adopted using Finite Element Method. Finally, RF MEMS switch was fabricated by surface micro machining as test vehicles. We checked out that alleviation effect for deformation of switch improved by 35%.

키워드

참고문헌

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