Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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Characteristics of Amorphous IZO Anode Films for Polymer OLEDs Grown by Box Cathode Sputtering

박스 캐소드 스퍼터로 성장시킨 고분자 유기발광소자용 비정질 IZO 애노드 박막의 특성

  • 문종민 (국립금오공과대학교 신소재시스템공학부) ;
  • 배정혁 (국립금오공과대학교 신소재시스템공학부) ;
  • 정순욱 (국립금오공과대학교 신소재시스템공학부) ;
  • 김한기 (국립금오공과대학교 신소재시스템공학부)
  • Published : 2006.06.01
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Abstract

Electrical, optical, surface, and structural properties of amorphous indium-zinc-oxide (a-IZO) grown by box cathode sputtering (BCS) were compared with crystalline indium-tin-oxide (c-ITO) anode films grown by conventional DC sputtering (DCS). Although x-ray diffraction plot of BCS-grown IZO film shows amorphous structure, the optical and electrical properties of a-IZO is comparable to those of c-ITO film. In particular, BCS-grown IZO films shows very smooth surface without defects such as pin hole and cracks because most of the energy of the sputtered atoms was confined in high density plasma region in box cathode gun. Furthermore polymer organic light emitting diodes (POLED) with the a-IZO anode film shows better electrical properties than that of POLED with the c-ITO anode film due to high work function and smooth surface of a-IZO. This suggested that BCS-grown a-IZO film is promising anode materials substituting conventional c-ITO anode in OLED and flexible displays.

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References

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