Journal of the Korean Electrochemical Society (전기화학회지)

The Korean Electrochemical Society (한국전기화학회)
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Local Anodization on Si surface Using Scanning Probe Microscope; Effects of Tip Voltage, Deflection Setpoint, and Tip Velocity on Line Height

주사탐침현미경을 이용한 Si 표면 국부 산화피막 형성시 선 높이에 대한 탐침 전위, 편향 셋포인트, 탐침 속도의 영향

  • Kim Chang-Hwan (Department of Chemistry and Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Choi Jeong-Woo (Department of Chemical & Biomolecular Engineering and Interdisciplinary Program of Integrated Biotechnology, Sogang University) ;
  • Shin Woon-Sup (Department of Chemistry and Interdisciplinary Program of Integrated Biotechnology, Sogang University)
  • 김창환 (서강대학교 화학과, 바이오융합기술 협동과정) ;
  • 최정우 (서강대학교 화공생명공학과, 바이오융합기술 협동과정) ;
  • 신운섭 (서강대학교 화학과, 바이오융합기술 협동과정)
  • Published : 2006.05.01
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Abstract

The effects of tip voltage, deflection setpoint, and tip velocity on height of $SiO_2$ line drawn by local anodization on Si wafer using scanning probe microscope were investigated. No local anodization was detected at smaller than -3 V of tip voltage. The line height increased at rate of 0.47 nm/V when the tip voltage is stronger than -3 V at $1{\mu}m/s$ tip velocity. From deflection setpoint, mechanical force between tip and substrate could be calculated and the threshold farce was $12\sim18nN$. The height of anodized $SiO_2$ lines is independent of the magnitude of force above the threshold force. The line height decreased as increasing the tip velocity and limited to 0.7 nm at -5 V tip voltage.

본 연구에서는 주사탐침현미경을 이용한 Si 표면의 국부 산화피막 형성에 있어서, 탐침이 움직이면서 생기는 $SiO_2$의 일차원적인 선의 높이가 탐침 전위, deflection setpoint, 탐침 속도에 의해 어떻게 영향을 받는지 고찰해 보았다. -3 V 보다 작은 탐침 전위에서는 국부 산화피막 형성이 관찰되지 않았으며 -3 V 보다 큰 탐침 전위에서는, 탐침 속도가 $1{\mu}m/s$일 때, 1 V씩 증가함에 따라 0.47nm의 비율로 선의 높이가 높아졌다. Deflection setpoint는 탐침이 가하는 기계적인 힘의 표지가 되는데, $12\sim18nN$ 정도의 힘이 가해지지 않으면 국부 산화피막 형성이 관찰되지 않았다. 그 이상의 힘이 가해져야 국부 산화피막 형성이 관찰되는데 이때 선의 높이는 기계적인 힘과 무관하였다. 탐침 속도가 빨라짐에 따라 선의 높이는 낮아졌으나, 탐침 전위가 -5V인 경우, 0.7nm 이하로 낮아지지는 않았다.

Keywords

References

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