반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제5권4호
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- Pages.41-45
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- 2006
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- 1738-2270(pISSN)
Modeling and Control of a Four Mount Active Micro-vibration Isolation System
- Banik, Rahul (NOM lab, Dept. of Mech. Eng., KAIST) ;
- Gweon, Dae-Gab (NOM lab, Dept. of Mech. Eng., KAIST)
- 발행 : 2006.12.31
초록
Micro vibration isolation, typically originated from ground, is always a prime concern for the nano-measurement instruments such as Atomic Force Microscopes. A four mount active vibration isolation system is proposed in this paper. Modeling and control of such a four mount system was analyzed. Combined active-passive isolation principle is used for vibration isolation by mounting the instrument on a passively damped isolation system made of Elastomer along with the active stage in parallel that consists of very soft actuation system, the Voice Coil Motor. The active stage works in combination with the passive stage for working as a very low frequency vibration attenuator.