대한전기학회논문지:전기물성ㆍ응용부문C (The Transactions of the Korean Institute of Electrical Engineers C)

대한전기학회 (The Korean Institute of Electrical Engineers)
권호 표지

열공압 방식으로 구동되는 매세 유체 제어 시스템의 제작 및 특성

Fabrications and Characteristics of Microfluidic Systems Actuated by Thermopneumatic Method

  • 발행 : 2006.02.01
PDF 다운로드
⟨ 이전 논문 다음 논문 ⟩

초록

We present a microfluidic system with microvalves and a micropump that are easily integrated on the same substrate using the same fabrication process. The fabricated microfluidic system is suitable for use as a disposable device and its characteristics are optimized for use as a micro chemical analysis system (micro-TAS) and lab-on-a-chip. The system is realized by means of a polydimethylsiloxane (PDMS)-glass chip and an indium tin oxide (ITO) heater. We demonstrate the integration of the micropump and microvalves using a new thermopneumatic-actuated PDMS-based microfluidic system. A maximum pumping rate of about 730 nl/min is observed at. a duty ratio of 1 $\%$ and a frequency of 2 Hz with a fixed power of 500 mW. The measured power at flow cut-off is 500 mW for the microvalve whose channel width, depth and membrane thickness were 400 $\mu$m, 110 $\mu$m, and 320 $\mu$m, respectively.

키워드

참고문헌

  1. Maria A. Schwarz and Peter C. Hauser, 'Recent developments in detecton methods for microfabricated analytical devices,' Lab on a chip, vol. 1, pp. 1-6, 2001 https://doi.org/10.1039/b103795c
  2. Mark A. Burns, Brian N. Johnson, Sundaresh N. Brahmasandra, Kalyan Handique, James R. Webster, Madhavi Krishnan, Timothy S. Sammarco, Piu M. Man, Darren Jones, Dylan Heldsinger, Carlos H. Mastrangelo, David T. Burke, 'An Integrated Nanoliter DNA Analysis Device,' Science, vol. 282, pp. 484-487, 1998 https://doi.org/10.1126/science.282.5388.484
  3. Woo Young Sim, Hyeun Joong Yoon, Ok Chan Jeong and Sang Sik Yang, 'A phase-change type micropump with aluminum flap valves,' Journal of Micromechanics and Microengineering, vol. 13, pp. 286-294, 2003 https://doi.org/10.1088/0960-1317/13/2/317
  4. S. Matsumoto, A. Klein and R. Maeda, 'Development of bi-directional valve-less micropump for liquid,' Twelfth IEEE International Conference on Micro Electro Mechanical Systems, 1999. MEMS '99. pp. 141-146
  5. Jin-Ho Kim, Kwang-Ho Na, C. J. Kang, and Yong-Sang Kim, 'A disposable thermopneumatic-actuated micropump stacked with PDMS layers and ITO-coated glass,'Sensors and actuators. A, Physical, vol. 120, no. 2, pp. 365-369, 2005 https://doi.org/10.1016/j.sna.2004.12.024
  6. Jin-Ho Kim, Kwang-Ho Na, C J Kang, D. Jeon, and Yong-Sang Kim, 'Thermopneumatic-actuated PDMS Microvalve,' Microelectronic Engineering, vol. 73-74, pp. 864-869, 2004 https://doi.org/10.1016/S0167-9317(04)00235-7
  7. Ju-Ho Kim, C. J. Kang, and Yong-Sang Kim, 'A Development of a Microfabricated Disposable Microchip with a Capillary Electrophoresis and Integrated Three-Electrode Electrochemical Detection,' Biosensors & Bioelectronics, vol. 20, no. 11, pp. 2314-2317, 2005 https://doi.org/10.1016/j.bios.2005.01.015
  8. 김주호, 이인제, 강치중, 김용상, 'Polydimethylsiloxane 채널과 indium tin oxide 전극을 이용한 일회용 전기화학적 검출 시스템,' 대한전기학회 논문지 54(C)권 5호, pp. 227-231, 2005
  9. 김진호, 조주현, 한경희, 김영호, 김한수, 김용상, '열공압 방식의 polydimethylsiloxane 마이크로 밸브의 제작 및 특성,' 대한 전기학회 논문지, 53(C)권 4호, pp. 231-236, 2004
  10. Hidekuni Takao, Kazuhiro Miyamura, Hiroyuki Ebi, Mitsuaki Ashiki, Kazuaki Sawada, and Makoto Ishida, 'A Thermo-pneumatic In-channel Microvalve With PDMS Diaphragm for Integrated Blood Examination System on Silicon,' The 12th International Conference on Solid State Sensors, Actuators and Microsystems, TRANSDUCERS '03, pp.139-142
  11. Robin H. Liu, Qing Yu, and Daid J. Beebe, 'Fabrication and Characterization of Hydrogel-Based Microvalves', Journal of Microelectromechanical ？System, vol. 11, no. 1, pp.45-53, 2002 https://doi.org/10.1109/84.982862
  12. Yevgeny Berdichevsky, Julia Khandurina, Andras Guttman, Y.-H. Lo, 'UV/ozone modification of poly(dimethylsiloxane) microfluidic channels', Sensors and actuators. B, Chemical, vol. 97, no. 2/3, pp.402-408, 2004 https://doi.org/10.1016/j.snb.2003.09.022
  13. Jong-Chul Yoo, Min-Chul Moon, C. J. Kang, D. Jeon and Yong-Sang Kim, 'Dynamic Characteristics of the Micro-Fluidic Systems Actuated by Thermopneumatic-Method', Japanese Journal of Applied Physics, To be published https://doi.org/10.1143/JJAP.45.519