정보저장시스템학회논문집 (Transactions of the Society of Information Storage Systems)
- 제2권2호
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- Pages.96-99
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- 2006
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- 1738-6845(pISSN)
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- 2288-2022(eISSN)
웨이퍼 본딩을 이용한 탐침형 정보 저장장치용 압전 켄틸레버 어레이
Thermo-piezoelectric $Si_3N_4$ cantilever array on a CMOS circuit for probe-based data storage using wafer-level transfer method
-
김영식
(LG 전자기술원) ;
- 장성수 (LG 전자기술원) ;
- 이선영 (LG 전자기술원) ;
- 진원혁 (LG 전자기술원) ;
- 조일주 (LG 전자기술원) ;
- 남효진 (LG 전자기술원) ;
- 부종욱 (LG 전자기술원)
-
Kim Young-Sik
;
- Jang Seong-Soo ;
- Lee Caroline Sun-Young ;
- Jin Won-Hyeog ;
- Cho Il-Joo ;
- Nam Hyo-Jin ;
- Bu Jong-Uk
- 발행 : 2006.06.01
초록
In this research, a wafer-level transfer method of cantilever away on a conventional CMOS circuit has been developed for high density probe-based data storage. The transferred cantilevers were silicon nitride (