참고문헌
- Kovacs. Gregory T. A., 1998. Micromachined Transducers Sourcebook. McGraw-Hill. pp. 278-281
- Hirai. Yoshihiko, Marushima. Yoshinari, Soda, Shinnosuke, Jin, Donghao, Kawata, Hiroaki, Inoue. Kouji, Tanaka, Yoshio, 2000, 'Electrostatic Actuator with Novel Shaped Cantilever,' 2000 International Symposium on Micromechatronics and Human Science. pp. 223-227
- Wei. Leow Cheah, Mohammad, Abu Baker, Kassim, Norazan Mohd., 2002. 'Analytical Modeling for Determination of Pull-in Voltage for An Electrostatic Actuated MEMS Cantilever Beam,' lCSE Proc., pp. 233-238
- Dequesnes, Marc, Rotkin, S. V., Aluru, N. R., 2002, 'Calculation of Pull-in Voltages for Carbonnanotube- based N anoelectromechanical Switches,' lOP publishing, pp. 120- 131
- Wang, P. K. C., 1998, 'Feedback Control of Vibration in a Micromachined Cantilever Beam with Electrostatic Actuators:' J. of Sound and Vibration, pp. 537-550
- Yoo, H. H., Moon, S. J., Jung, K. S., 2004, 'Dynamic Analysis of Micro Cantilever Beams Undertaking Electrostatic Forces:' Transactions of the Korean Society for Noise and Vibration Engineering, Vol. 14. No. 9, pp. 846-851 https://doi.org/10.5050/KSNVN.2004.14.9.846
피인용 문헌
- Efficiency Test for Low Electric Power Type and MEMS Based 3-axis Accelerometer vol.18, pp.1, 2014, https://doi.org/10.11112/jksmi.2014.18.1.160