Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Ultra Precision Machine Tools for Machining the Large Surface Micro Feature

대면적 미세형상 가공기

  • 박천홍 (한국기계연구원 지능기계센터) ;
  • 송창규 (한국기계연구원 지능기계센터)
  • Published : 2005.05.01
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References

  1. Heeren, P., Reynaerts, D., Brussel, H. Van, Beuret, C., Larsson, O. and Bertholds, A., 'Microstructuring of silicon by electro-discharge machining (EDM) - part II: applications,' Sensors and Actuators A: Physical, Vol. 61, pp. 379-386,1997 https://doi.org/10.1016/S0924-4247(97)80293-2
  2. Li, Y., Guo, M., Zhou, Z. and Hu, M., 'Micro electro discharge machine with an inchworm type of micro feed mechanism,' Precision Engineering, Vol. 26, No. 1, pp. 7-14, 2002 https://doi.org/10.1016/S0141-6359(01)00088-5
  3. Malek, C. K. and Saile, V., 'Applications of LIGA technology to precision manufacturing of high-aspect ratio micro-components and systems: a review,' Microelectronics Journal, Vol. 35, No.2, pp.131-143, 2004 https://doi.org/10.1016/j.mejo.2003.10.003
  4. Yang, H. and Kang, S., 'Improvement of thickness uniformity in nickel electroforming for the LIGA process,' Int. J. of Machine Tools & Manufacture, Vol. 40, No.7, pp. 1065-1072, 2000 https://doi.org/10.1016/S0890-6955(99)00107-8
  5. Bertsch, A., Lorenz, H. and Renaud, P., '3D microfabrication by combining microstereolitho graphy and thick resist UV lithography,' Sensors and Actuators A: Physical, Vol. 73, pp. 14-23, 1999 https://doi.org/10.1016/S0924-4247(98)00249-0
  6. Rahman, M. A., Rahman, M., Kumar, A. S. and Lim, H. S., 'CNC microturning: an application to miniaturization,' Int. J. of Machine Tools & Manufacture, Vol.45, No.6, pp. 631-639, 2005 https://doi.org/10.1016/j.ijmachtools.2004.10.003
  7. Lim, H. S., Kumar, A. S. and Rahman, M., 'Improvement of form accuracy in hybrid machining of microstructures,' J. of Electronic Materials, Vol. 31, No. 10, pp. 1032-1038, 2002 https://doi.org/10.1007/s11664-002-0039-1
  8. Lee, I. H., Kim, D. S., Cho, D. S. and Kwon, T. H., 'Micro-injection molding and micro-stereolitho graphy,' Proc. of Korea-Japan Joint Symposium on Nanoengineering 2003, pp. 100-106, 2003
  9. Lee, B. K., Kim, D. S. and Kwon, T. H., 'Replication of microlens arrays by injection molding,' Proceedings of HARMST(High Aspect Ratio Micro-Structure Technology) 2003, pp. 115-116, 2003
  10. Fischer, S., 'Manufacturing system for production of micro structure,' WZL(Aachen), 2000
  11. Week, M., Fischer, S. and Vos, M., 'Fabrication of microcomponents using ultraprecision machine tools,' Nanotechnology, Vol. 8, pp. 145-148, 1997 https://doi.org/10.1088/0957-4484/8/3/007
  12. Takeuchi, Y., Sakaida, H., Sawada, T. and Sata, T., 'Development of 5-axis control ultraprecision milling machine for micromachining based on nonfriction servomechanism,' Annals of CIRP, Vol. 49, No. 1, pp. 295-298, 2000 https://doi.org/10.1016/S0007-8506(07)62949-7
  13. Takeuchi, K. and Hirano, M., 'Development of high precision free-form surface machine driven by linear motor,' Proc. of JSPE Ultra Precision Positioning Committee, No. 2003-3, pp. 19-22, 2003
  14. Hwang, J. H., Park, C. H., Lee, C. H. and Kim, S. W., 'Analysis on the Positioning Error of an Aerostatic Stage,' the 1st Korea-Japan Conf. on Positioning Technology, pp27-31, Oct., 2002
  15. Park, C. H., Oh, Y. J., Hwang, J. H. and Lee, D. W., 'Experimental Analysis on Thermal Characteristics of Hydrostatic Guideway for Precision Positioning,' the 1st Korea-Japan Conf. on Positioning Technology, pp52-57, Oct., 2002
  16. Kiyono, S., 'Profile Measurement Using Software Datums,' J. of JSPE, Vol. 61, No. 8, pp. 1059-1063, 1995
  17. Fung, E. H. K. and Yang, S. M., 'An approach to on-machine motion error measurement of a linear slide,' Measurement, Vol. 29, pp. 51-62, 2001 https://doi.org/10.1016/S0263-2241(00)00027-0
  18. Makinouchi, S. and Tanimoto, A., 'Ultra precision stage technology in current and next generation lithography,' Proc. of Korea-Japan Joint Symposium on Nanoengineering 2003, pp. 178-182, 2003