한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제18권11호
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  • Pages.1014-1018
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  • 2005
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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박막과 압전 재료 결합에 관한 연구

Study on the Bonding Process between Thin film and Piezoelectric Materials

  • 정우석 (전북대학교 의용생체공학과) ;
  • 김기범 (전북대학교 생체정보공학부) ;
  • 홍철운 (전북대학교 생체정보공학부)
  • 발행 : 2005.11.01
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초록

The purpose of this study is to obtain strong bond strength at the interface between piezoelectric substrates and semiconductor thin films to be applied for the manufacture of high-performance acoustic wave semiconductor coupled device. For this purpose, we have compared and examined the effects of different surface treatment methods on hydrophile properties at the surface of the piezoelectric substrates. Moreover, we have observed the effect of microwave and laser on the elimination of water molecules at the interface. As for the piezoelectric substrates, dry method for surface treatment was found to be superior in the control of hydrophilicity of the surface compared to wet method. On the other hand, both microwave and laser were found to be effective in the elimination of water molecules in the interface.

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참고문헌

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