DOI QR코드

DOI QR Code

SOI 기판을 이용한 Thermal Probe 어레이 제작 및 특성 평가

Fabrication and Characterization of Thermal Probe Array on SOI Substrates

  • 조주현 (충북대학교 반도체공학과) ;
  • 나기열 (충북대학교 반도체공학과) ;
  • 박근형 (충북대학교 반도체공학과) ;
  • 이재봉 (충북대학교 반도체공학과) ;
  • 김영석 (충북대학교 반도체공학과)
  • 발행 : 2005.11.01

초록

This paper reports the fabrication and characterization of $5\;\times\;5$ thermal cantilever array for nano-scaled memory device application. The $5\;\times\;5$ thermal cantilever array with integrated tip heater has been fabricated with MEMS technology on SOI wafer using 7 photo masking steps. All single-level cantilevers have a diode in order to eliminate any electrical cross-talk between adjacent tips. Electrical measurements of fabricated thermal cantilever away show its own thermal heating mechanism. Thermal heating is demonstrated by the reflow of coated photoresist on the cantilever array surface.

키워드

참고문헌

  1. L. Shi, O. M. Kwon, G. Wu, and A. Majumdar, 'Quantitative thermal probing of devices at Sub-100 nm resolution', Proc. IEEE Int. Reliability Physics Symp., p. 394, 2000
  2. Li, M.-H., J. J, Wu, and Y. B. Gianchandani, 'High performance scanning thermal cantilever using a low temperature polymide - based micromachining process', 13th Annual International Conference on Micro Electro Mechanical Systems(MEMS), p. 763, 2000
  3. L. Shi, O. M. Kwon, A. C. Miner, and A. Majumdar, 'Design and batch fabrication of cantilevers for Sub-100 nm scanning thermal microscopy', J. of Microelectromechanical Systems, Vol. 10, Iss. 3, p. 370, 2001 https://doi.org/10.1109/84.946785
  4. H. J. Mamin, R. P. Ried, B. D. Terris, and D. Rugar, 'High-density data storage based on the atomic force microscope', Proc. IEEE, Vol. 87, No. 6, p. 102, 1999
  5. P. Vettiger, M. Despont, U. Drechsler, U. Durig, W. Haberle, M. I. Lutwyche, H. E. Rothuizen, R. Stutz, R. Widmer, and G. K. Binnig, 'The 'Millipede' - More then one thousand tips for future AFM data storage', IBM J. Res. Develop., Vol. 44, No. 3, p. 323, 2000
  6. W. P. King, T. W. Kenny, K. E. Goodson, G. L. W. Cross, M. Despont, U. T. Durig, H. Rothuizen, G. Binning, and P. Vettiger, 'Design of atomic force microscope cantilevers for combined thermomechanical writing and thermal reading in array operation', J. of Microelectromechanical Systems, Vol. 11, No. 6, p. 765, 2002