Transactions of the Society of Information Storage Systems (정보저장시스템학회논문집)
- Volume 1 Issue 2
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- Pages.127-131
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- 2005
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- 1738-6845(pISSN)
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- 2288-2022(eISSN)
Manometer Scale Mark Formation using Thermal Reaction For Storage Application
열 반응을 이용한 나노사이즈 마크형성
- Jung, Moon-Il ;
- Kim, Joo-Ho ;
- Hwang, In-Oh ;
- Kim, Hyun-Ki ;
- Bae, Jae-Cheol ;
- Park, In-Sik ;
- Kuwahara, Masashi (Center for Applied Near-Field Optics Research National Institute of Advanced Industrial Science and Technology(AIST)) ;
- Tominaga, Junji (Center for Applied Near-Field Optics Research National Institute of Advanced Industrial Science and Technology(AIST))
- 정문일 (삼성전자(주) 디지털미디어연구소) ;
- 김주호 (삼성전자(주) 디지털미디어연구소) ;
- 황인오 (삼성전자(주) 디지털미디어연구소) ;
- 김현기 (삼성전자(주) 디지털미디어연구소) ;
- 배재철 (삼성전자(주) 디지털미디어연구소) ;
- 박인식 (삼성전자(주) 디지털미디어연구소) ;
- 마사시 구와하라 ;
- 준지 토미나가
- Published : 2005.12.01
Abstract
We report a nanometer scale mark formation using a
Keywords
- optical ROM DISK;
- mutual diffusion;
- volume change thermal lithography(VCTL);
- $PtO_x$;
- TbFeCo;
- multi-layer;
- bubble mark;
- electron beam(EB)