References
- Verdee, M. S., 'Nanometrology of optical flats by laser autocollimation,' Surface Topography, Vol. 1, pp. 415-425,1988
- Teague, E. C., 'Nanometrology,' Proceedings of AIP Conference, (1992), pp. 371-407
- Conclusions of the WGDM 3 Discussion Group on Nanometrology, 25 June, 1998
- Evans, C., 'Precision Engineering: an Evolutionary View,' Cranfield Press, 1989
- Sawabe, M., 'Benefit derived from the histroy of length measuring technology,' Bulletin of the Society of Historical Metrology, Japan, Vol. 22, No. 1, pp. 9-16, 2000 (in Japanese)
- Smith, S. T. and Chetwynd, D. G., 'Foundations of ultraprecision mechanism design,' Gordon and Breach Science Publishers, 1992
- Homepage of The Center For Precision Metrology, The University of North Carolina at Charlotte, http://www.cpm.uncc.edu/
- Whitehouse, D. J., 'Some theoretical aspects of error separation techniques in surface metrology,' J. of Phys. E: Sci. Instrum., Vol. 9, pp. 531-536, 1976 https://doi.org/10.1088/0022-3735/9/7/007
- Evans, Chris J., Hocken, R. J. and Estler, W. Tyler, 'Selfcalibration: Reversal, Redundancy, Error Separation and 'Absolute Testing,' Annals of CIRP, Vol. 45, No. 2, pp. 617-634, 1996 https://doi.org/10.1016/S0007-8506(07)60515-0
- Gao, W., Kiyono, S. and Nomura, T., 'A new multi-probe method of roundness measurements,' Precision Engineering, Vol. 19, No. 1 , pp. 37-45, 1996 https://doi.org/10.1016/0141-6359(96)00006-2
- Gao, W, 'Nanometrology of spindle errors using error separation methods,' J. JSPE, Vol. 67, No. 7, pp. 1067-1071, 2001
- Gao, W., Kiyono, S. and Sugawara, T., 'High accuracy roundness measurement by a new error separation method,' Precision Engineering, Vol. 21, No. 2/3, pp. 123-133, 1997 (in Japanese) https://doi.org/10.1016/S0141-6359(97)00081-0
- Gao, W. and Kiyono, S., 'Development of an optical probe for profile measurement of mirror surfaces,' Optical Engineering, Vol. 36, No. 12, pp. 3360-3366, 1997 https://doi.org/10.1117/1.601563
- Ennos, A.E. and Virdee, M.S., 'High accuracy profile measurement of quasi-conical mirror surfaces by laser autocollimation,' Precision Engineering, Vol. 4, No. 1, pp. 5-8, 1982 https://doi.org/10.1016/0141-6359(82)90106-4
- Gao, W., Kiyono, S. and Satoh, E., 'Precision measurement of multi-degree-of-freedom spindle errors using two-dimensional slope sensors,' Annals of CIRP, Vol. 51, No. 1, pp. 447-450, 2002 https://doi.org/10.1016/S0007-8506(07)61557-1
- Zhang, G. X. and Wang, R. K., 'Four-point method of roundness and spindle error measurements,' Annals of the CIRP, Vol. 42, No. 1, pp. 593-596, 1993 https://doi.org/10.1016/S0007-8506(07)62517-7
- Gao, W., Huang, P. S., Yamada, T. and Kiyono, S., 'A compact and sensitive two-dimensional angle probe for flatness measurement of large silicon wafers,' Precision Engineering, Vol. 26, No. 4, pp. 396-404, 2002 https://doi.org/10.1016/S0141-6359(02)00121-6
- Gao, W., Yamada, T., Furukawa, M., Nakamura, T., Shimizu, H. and Kiyono, S., 'Precision nanometrology of large silicon wafer flatness,' Journal of Nanotechnology and Precision Engineering, Vol. 1, No. 1, pp. 71-78, 2003
- Gao, W., 'Nano-metrology of large surface profiles using angle sensors,' J. JSPE, Vol. 68, No. 3, pp. 367-371, 2002 (in Japanese)
- Gao, W., Yokoyama, J., Kojima, H. and Kiyono, S., 'Precision measurement of cylinder straightness using a scanning multi-probe system,' Precision Engineering, Vol. 26, No. 3 ,pp. 279-288, 2002
- Gao, W., Hocken, R. J., Patten, J. A., Lovingood, J. and Lucca, D. A, 'Construction and testing of a nanomachining instruments,' Precision Engineering, Vol. 24, No. 4 , pp. 320-328, 2000 https://doi.org/10.1016/S0141-6359(00)00042-8
- Gao, W., Hocken, R. J., Patten, J. A. and Lovingood, J., 'Experiments using a nano-machining instruments for nanocutting brittle materials,' Annals of CIRP, Vol. 49, No. 1, pp. 439-442, 2000 https://doi.org/10.1016/S0007-8506(07)62984-9
- Gao, W., Hocken, R. J., Patten, J. A. and Lovingood, J.,'Force measurement in a nanomachining instruments,' Review of Scientific Instruments, Vol. 71, No. 11, pp. 4325-4329, 2000 https://doi.org/10.1063/1.1319976
- Patten, J. A. and Gao, W., 'Extreme negative rake angle technique for single point diamond nano-cutting of silicon,' Precision Engineering, Vol. 25, No. 2, pp. 165-167, 2001 https://doi.org/10.1016/S0141-6359(00)00072-6
- Patterson, S. R. and Magrab, E. B., 'Design and testing of a fast tool servo for diamond turning,' Prec. Eng., Vol. 7, No. 3, pp. 123-128, 1985 https://doi.org/10.1016/0141-6359(85)90030-3
- Dow, T. A, Miller, M. H. and Falter, P. J., 'Application of a fast tool servo for diamond turning of nonrotationally symmetric surfaces,' Precision Engineering, Vol. 13, No. 4, pp. 233-250, 1991
- Okazaki, Y., 'Fast tool servo system and its application to three dimensional fine figures,' Proc. of 13th ASPE, pp. 100-103, 1998
- Gao, W., Araki, T., Kiyono, S., Okazaki, Y. and Yamanaka, M., 'Precision Nano-fabrication and evaluation of a large area sinusoidal grid surface for a surface encoder,' Precision Engineering, Vol. 27, No. 3, pp. 289-298, 2003 https://doi.org/10.1016/S0141-6359(03)00028-X
- Gao, W., Araki, T. and Kiyono, S., 'Precision nanometrology of a large area microstructured metrology surface,' Optics and Precision Engineering, Vol. 11, No. 3, pp. 223-226, 2003
- Kiyono, S., Cai, P. and Gao, W., 'An angle-based position detection method for precision machines,' JSME International Journal, Vol. 42, No. 1, pp. 44-48, 1999
- Gao, W., Dejima, S., Shimizu, Y. and Kiyono, S., 'Precision measurement of two-axis positions and tilt motions using a surface encoder,' Annals of CIRP, Vol. 52, No. 2, pp. 435-438, 2003 https://doi.org/10.1016/S0007-8506(07)60619-2
- Gao, W., Nakada, T. and Kiyono, S., 'Precision positioning of a surface motor-driven multi-axis stage using a surface encoder,' Journal JSPE, Vol. 67, No. 12, pp. 1981-1985, 2001. (in Japanese)
-
Gao, W., Dejima, S., Yanai, H., Katakura, K., Kiyono, S., Y. Tomita, 'A surface motor-driven planar motion stage integrated with an XY
$\theta_z$ surface encoder for precision positioning,' Precision Engineering, 28-3, pp. 329-337, 2004