한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제18권10호
  • /
  • Pages.941-944
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  • 2005
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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DOI QR코드

DOI QR Code

플라즈마 조건 변화에 따른 ITO 특성 분석 및 유기발광소자의 제작에 관한 연구

A Study on the Characteristic Analysis of ITO and the Fabrication of Organic Light Emitting Diodes by Variation of Plasma Condition

  • 김중연 (건국대학교 차세대 유기디스플레이센터) ;
  • 강성종 (건국대학교 차세대 유기디스플레이센터) ;
  • 조재영 (건국대학교 차세대 유기디스플레이센터) ;
  • 김태구 (건국대학교 차세대 유기디스플레이센터) ;
  • 오환술 (건국대학교 차세대 유기디스플레이센터)
  • 발행 : 2005.10.01
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초록

In this experiment, OLEDs(Organic Light Emitting Diodes) was fabricated to confirm effect of Plasma treatment which increase the hole injection characteristic from anode. Device structure was $ITO/2-TNATA/{\alpha}-NPD/DPVBi/BAlq/Alq_3/Al:Li$. We used DPVBi (4, 4 - Bis (2,2-diphenylethen-1-yls) - Biphenyl) as a blue emitting material. To optimize the process condition of plasma treatment, we used 2 gases of the oxygen and nitrogen gas under 120 mTorr with 100 W, 200 W, and 400 W plasma power. The current efficiency of $N_2$ plasma is more efficient than that of $O_2$ plasma. At $1000 cd/m^2$, we obtained the maximum current efficiency of 6.45 cd/A using $N_2$ gas with 200 W plasma power.

키워드

참고문헌

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