Journal of the Korean institute of surface engineering (한국표면공학회지)

The Korean Institute of Surface Engineering (한국표면공학회)
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Microstructure of Ti-Cr-Si-N Coatings Deposited by a Hybrid System of Arc ion Plating and Sputtering Techniques

하이브리드 코팅시스템에 의해 제조된 Ti-Cr-Si-N 박막의 미세구조 및 기계적 특성연구

  • Kang Dong Shik (School of Materials Science and Engineering, Pusan National University) ;
  • Jeon Jin Woo (School of Materials Science and Engineering, Pusan National University) ;
  • Song Pung Keun (School of Materials Science and Engineering, Pusan National University) ;
  • Kim Kwang Ho (School of Materials Science and Engineering, Pusan National University)
  • Published : 2005.06.01
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Abstract

Quaternary Ti-Cr-Si-N coatings were synthesized onto steel substrates (SKD 11) using a hybrid method of arc ion plating (AIP) and sputtering techniques. For the Syntheses of Ti-Cr-Si-N coatings, the Ti-Cr-N coating process was performed substantially by a multi-cathodic AIP technique rising Cr and Ti targets, and Si was added by sputtering Si target during Ti-Cr-N deposition. In this work, comparative studies on microstructure and evaluation of mechanical properties between Ti-Cr-N and Ti-Cr-Si-N coatings were conducted. As the Si was incorporated into Ti-Cr-N coatings, the Ti-Cr-Si-N coatings showed largely increased hardness value of approximately 42 GPa than one of 28 GPa for Ti-Cr-N coatings. The average friction coefficient of Ti-Cr-N coatings largely decreased from 0.7 to 0.35 with increasing Si content up to 20 at. $\%$. In addition, wear behavior of Ti-Cr-N coatings against steel ball was much improved with Si addition due to the surface smoothening effect and tribe-chemical reaction.

Keywords

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