JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
권호 표지

Polymer/Metal Based Flexible MEMS Biosensors for Nerve Signal Monitoring and Sensitive Skin

  • Kim, Yong-Ho (School of Mechanical Engineering, Yonsei University, Republic of Korea) ;
  • Hwang, Eun-Soo (School of Mechanical Engineering, Yonsei University, Republic of Korea) ;
  • Kim, Yong-Jun (School of Mechanical Engineering, Yonsei University, Republic of Korea)
  • Published : 2005.03.31
Download PDF
⟨ Previous Next ⟩

Abstract

This paper presents fabrication process and experimental results of two different types of flexible MEMS biosensors based on polymer/metal multilayer processing techniques. One type of a biosensor is a microelectrode array (MEA) for nerve signal monitoring through implanting the MEA into a living body, and another is a tactile sensor capable of being mounted on an arbitrary-shaped surface. The microelectrode array was fabricated and its electrical characteristics have been examined through in vivo and in vitro experiment. For sensitive skin, flexible tactile sensor array was fabricated and its sensitivity has been analyzed. Mechanical flexibility of these biosensors has been achieved by using a polymer, and it is verified by implanting a MEA to an animal and mounting the tactile sensor on an arbitrary-shaped surface.

Keywords

References

  1. Y.-J. Kim, 'Application of polymer/metal multi-layer processing techniques to microelectromechanical systems,' Ph. D. dissertation, Georgia Inst. Tech., 1997
  2. R. M. Bradley et al., 'Long-term chronic readings from peripheral sensor fibers using a sieve electrode array,' J. Neuro. Meth., Vol. 73, pp. 177-186, 1997 https://doi.org/10.1016/S0165-0270(97)02225-5
  3. T. Stieglitz et al., 'Flexible polyimide-based neural interfaces,' Proc. NFBIS, pp. 112-119, 1999 https://doi.org/10.1109/MN.1999.758853
  4. E. -S. Hwang et al., 'Flexible Polysilicon sensor array module using 'etch-release' packaging scheme,' Sen. Act. A, Vol. 111, pp. 135-141, 2004 https://doi.org/10.1016/j.sna.2003.10.022
  5. G. T. A. Kovacs et al., 'Regeneration microelectrode array for peripheral nerve recording and stimulation,' IEEE Trans. Biomed. Eng., Vol. 39, No. 9, pp. 893-902, 1992 https://doi.org/10.1109/10.256422
  6. E. Valderrama et al., 'Microfabrication and characterization of microelectrode arrays for in vivo nerve signal recording,' Proc. Int. Conf. Trans. pp. 63-66, 1995 https://doi.org/10.1109/SENSOR.1995.717087
  7. Mark H. Lee, 'Tactile sensing: New Directions, New Chanllenges', Int. J. Robotics Research, Vol. 19 No. 7, pp. 636-643, 2000 https://doi.org/10.1177/027836490001900702