한국결정성장학회지 (Journal of the Korean Crystal Growth and Crystal Technology)

  • 제15권3호
  • /
  • Pages.120-123
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  • 2005
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  • 1225-1429(pISSN)
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  • 2234-5078(eISSN)
한국결정성장학회 (The Korea Association of Crystal Growth)
권호 표지

LPE법으로 성장시킨 $Zn:LiNbO_3/Mg:LiNbO_3$ 단결정 박막의 구조적 특성

Structural properties of $Zn:LiNbO_3/Mg:LiNbO_3$ single crystal thin films grown by LPE method

  • 이호준 (성균관대학교 신소재공학과) ;
  • 신동익 (성균관대학교 신소재공학과) ;
  • 이종호 (한국생산기술원) ;
  • 윤대호 (성균관대학교 신소재공학과)
  • Lee, H.J. (Department of Advanced Materials Engineering, Sungkyunkwan University) ;
  • Shin, T.I. (Department of Advanced Materials Engineering, Sungkyunkwan University) ;
  • Lee, J.H. (Energy & Applied Optics Team, Korea Institute of Industrial Technology) ;
  • Yoon, D.H. (Department of Advanced Materials Engineering, Sungkyunkwan University)
  • 발행 : 2005.06.30
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초록

[ $Li_2CO_3-V_2O_5$ ], flux를 사용한 liquid phase epitaxy(LPE) 법을 사용하여 $LiNbO_3$ (001) 기판위에 5 mol% ZnO가 첨가된 $LiNbO_3$, 박막과 2 mol% MgO가 첨가된 $LiNbO_3$, 박막을 성장시켰다. $Zn:LiNbO_3$, 막과 $Mg:LiNbO_3$, 막과의 결정성과 격자 부정합은 x-ray rocking curve(XRC)로 분석되었다. 그리고 다층 박막의 단면에서의 ZnO와 MgO의 분포가 electron probe micro analyzer(EPMA)를 사용하여 관측되었다.

The 5 mol% ZnO doped $LiNbO_3$ film and the 2 mol% MgO doped $LiNbO_3$ film were grown on the $LiNbO_3$ (001) substrate by liquid phase epitaxy (LPE) method with $Li_2CO_3-V_2O_5$ flux system. The crytsallinity and the lattice mismatch between $Zn:LiNbO_3$, film and $Mg:LiNbO_3$, film were analyzed by x-ray rocking curve (XRC). In addition, the ZnO and MgO distribution in the cross-section of the multilayer thin films was observed using electron probe micro analyzer (EPMA).

키워드

참고문헌

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