Journal of Sensor Science and Technology (센서학회지)

The Korean Sensors Society (한국센서학회)
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Potentiometric CO2 gas sensor based on the thin film electrolyte of Li+ ion conductor

박막 리튬이온전도체를 이용한 전위차 CO2 가스센서

  • Published : 2005.07.30
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Abstract

Li+-ion conducting ($Li_{3}PO_{4}$) thin films with thickness of $0.3{\mu}m$, $0.65{\mu}$, $1.2{\mu}$ were deposited on $Al_{2}O_{3}$ substrate at room temperature by thermal evaporation. They were sintered at $700^{\circ}C$ and $800^{\circ}C$ for 2 hours, respectively. Reference electrode and sensing electrode were printed on Au-electrode by silk printing method. The EMF and the ${\Delta}EMF$/dec were increased with increasing the electrolyte thickness and sintering temperature. The sample sintered at $800^{\circ}C$ was shown a good response and recovery characteristics more than those sintered at $700^{\circ}C$. The Nernst's slop of 75 mV per decade was obtained at operating temperature of $500^{\circ}C$.

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