JSTS:Journal of Semiconductor Technology and Science

The Institute of Electronics and Information Engineers (대한전자공학회)
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On-Chip Spiral Inductors for RF Applications: An Overview

  • Chen, Ji (Electrical and Computer Engineering Dept., University of Central Florida) ;
  • Liou, Juin J. (Electrical and Computer Engineering Dept., University of Central Florida)
  • Published : 2004.09.30
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Abstract

Passive components are indispensable in the design and development of microchips for high-frequency applications. Inductors in particular are used frequently in radio frequency (RF) IC's such as low-noise amplifiers and oscillators. This paper gives a broad overview on the on-chip spiral inductors. The design concept and modeling approach of the typical square-shaped spiral inductor are first addressed. This is followed by the discussions of advanced structures for the enhancement of inductor performance. Research works reported in the literature are summarized to aid the understanding of the recent development of such devices.

Keywords

References

  1. T H Lee and S S Wong, CMOS RF Integrated circuits at 5 GHz and beyond, Proc IEEE, Vol 88. pp 1560-1571. Oct 2000 https://doi.org/10.1109/5.888995
  2. T H Lee, The Design of CMOS Radio-Frequency Integrated Circuits, Cambridge University Press, 2002
  3. Ali M Niknejad and Robert G Meyer, Design, Simulation and Applications of Inductors and Transformers for Si RF ICs, Kluwer Academic Publishers, 2000
  4. C Patrick Yue, On-Chip Spiral Inductors for Silicon-Based Radio-Frequency Integrated Circuits, Doctoral Dissertation, Stanford University, 1998
  5. Ken Boak, An introduction to telephone line interfacing using the PIC microcontroller, http // puggy symonds net/-catalyticideas/rat_ring/index
  6. Seung-Min Oh, Chang-Wan Kim. and Sang-Gug Lee A 74%, 1.56 -2.71 GHz, wide-tunable LC-tuned VCO in 0.35 CMOS technology, Microwave and Optical Technology Letters, Vol 37 pp 98-100, April 2003 https://doi.org/10.1002/mop.10835
  7. Tsui Chiu, Integrated On-Chip Inductors For RadIO Frequency CMOS Circuits, Master Drssertatron, Hong Kong Polytechnic University, 2003
  8. S Chaki, S Aono, N Anodoh, Y Sasaki, N Tanino, and O Ishihara, Experimental study on spiral inductors, Digest of IEEE International Microwave Theory and Techniques-Symposium, 1995
  9. N M Nguyen and R G Meyer, Si IC-compatible inductors and LC passive filters, IEEE Journal of Solid-State Circuits, Vol 25, Pages 1028-1031, Aug 1990 https://doi.org/10.1109/4.58301
  10. K B Ashby, W C Finley, J J Bastek, S Moinian, and I A Koullias, High Q inductors for wireless applications in a complementary silicon bipolar process, Proc Bipolar/BiCMOS Circuits and Technology Meeting, Pages, 179-182. 1994 https://doi.org/10.1109/BIPOL.1994.587889
  11. C Patrick Yue and S Simon Wong, Physical modeling of spiral inductors on silicon, IEEE Transactions on Electron Devices, Vol 47, March 2000 https://doi.org/10.1109/16.824729
  12. Frederick W Grover, Inductance Calculations, New York, D Van Nostrand Company, Inc 1946
  13. H M Greenhouse, Design of planar rectangular microelectronic inductors, IEEE Transactions on Parts, Hybrids, and Packaging, Vol 10, Pages 101-109, 1974 https://doi.org/10.1109/TPHP.1974.1134841
  14. S Jenei, B K J C Nauwelaers, and S Decoutere. Physics-based closed-form inductance expresstion for compact modeling of intergrated spiral inductors, IEEE Journal of Solid-State Circuits, Vol 37, Pages 77-80, Jan 2002 https://doi.org/10.1109/4.974547
  15. Sunderarajan S Mohan, The Design, Modeling And Optimization Of On-Chip Inductor And Transformer Circuit, Doctoral dissertation, Stanford University, 1999
  16. J Crols, P Kinget, J Craninckx, and M Steyeart, An analytical model of planar inductors on lowly doped silicon substrates for analog design up to 3GHz, Digest of VLSI Circuits, pp 28-29, 1996 https://doi.org/10.1109/VLSIC.1996.507703
  17. J O Voorman, Continuous-time analog integrated filters, IEEE Press, 1993
  18. H E Bryan, Printed inductors and capacitors, Tele-tech and Electronic Industries, December 1955
  19. Yu Cao, R A Groves, N D Zamdmer, J O Plouchart, R A Wachnik, Xuejue Huang, T J King, and Chenming Hu, Frequency-independent equivalent circuit model for on-chip spiral inductors, Proc IEEE Custom Integrated Circuits Conference, pp 217-220, 2002 https://doi.org/10.1109/CICC.2002.1012800
  20. T Kamgaing, T Myers. M Petras, and M Miller, Modeling of frequency dependent losses in two-port and three-port inductors on silicon, IEEE Radio Frequency Integrated Circuits Symposium, Pages 307-310, 2002 https://doi.org/10.1109/RFIC.2002.1012055
  21. Ban-Leong Ooi, Dao-Xian Xu, Pang-Shyan Kooi, and Fu-Jiang Lin, An Improved prediction of series resistance in spiral inductor modeling with eddy-current effect. IEEE Trans Microwave Theory and Techniques, Vol 50, Pages 2202-2206, Sept 2002 https://doi.org/10.1109/TMTT.2002.802337
  22. W B Kuhn and N M Ibrahim, Approximate analyticall modeling of current crowding effects in multi-turn spiral inductors, Digest of MIcrowave Symposium. Pages 405-408, June 2002 https://doi.org/10.1109/MWSYM.2000.861041
  23. F M Rotella, V Blaschke, and D Howard, A broad-band scalable lumped-element inductor model using analytic expressions to incorporate skin effect, substrate loss, and proximity effect, Digest of IEEE International Electron Device Meeting, Pages 471-474, Dec 2002 https://doi.org/10.1109/IEDM.2002.1175881
  24. D Melendy, P Francis, C Pichler, Hwang Kyuwoon, G Srinivasan, and A Weisshaar, Wide-band compact modeling of spiral inductors in RFICs, Digest of Microwave Symposium, Pages 717-720, June 2002 https://doi.org/10.1109/MWSYM.2002.1011727
  25. X Z Xiong, V F Fusco, and B Toner, Optimized design of spiral inductors for Si RF IC's, High Frequency Postgraduate Student Colloquium, Pages 51-58, Sept 2002 https://doi.org/10.1109/HFPSC.2000.874082
  26. Chia-Hsin Wu, Chih-Chun Tang, and Shen-Iuan Liu, Analysis of on-chip spiral inductors using the distributed capacitance model, IEEE Journal of Solid-St Circuits, Vol 38, Pages 1040-1044, June 2003 https://doi.org/10.1109/JSSC.2003.811965
  27. H B Erzgraber, M Pierschel, G G Fischer, T Grabolla, and A Wolff, High performance integrated spiral inductors based on a minimum AC difference voltage principle,Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Pages 71-74, April 2000 https://doi.org/10.1109/SMIC.2000.844301
  28. C P Yue and S S Wong, On-chip spiral inductors with patterned ground shields for Si-based RF ICs, IEEE Journal of Solid-State Circuit, Vol 33, Pages 743-752, May 1998 https://doi.org/10.1109/4.668989
  29. Joonho Gil and Hyungcheol Shin, Simple wideband on-chip inductor model for silicon-based RF ICs, International Conference on Simulation of Semiconductor Processes and Devices, Pages 35-38, Sept 2003 https://doi.org/10.1109/SISPAD.2003.1233631
  30. H Lakdawala, X Zhu, H Luo, S Santhanam, L R Carley, and G K Fedder, Micromachined high-Q inductors in a 0.18-${\mu}m$ copper interconnect low-k dielectric CMOS process, IEEE Journal ot Solid- State Circuits, Vol 37, Pages 394-403, Mar 2002 https://doi.org/10.1109/4.987092
  31. D M Krafcsik and D E Dawson, A Closed-Form Expression for Representing the Distributed Nature of the Spiral inductor, Microwave and Millimeter- Wave Monolithic Circuits, Vol 86. Pages 87-92, June 1986 https://doi.org/10.1109/MCS.1986.1114485
  32. K Murata, T Hosaka, and Y Sugimoto, Effect of a ground shield of a Silicon on-chip spiral inductor, Asia-Pacific Microwave Conference, Pages 177-180, Dec 2002 https://doi.org/10.1109/APMC.2000.925754
  33. Y E Chen, D Bien, D Heo, and J Laskar, Q-enhancement of spiral inductor with N+-diffusion patterned ground shields, Digest of IEEE International Microwave Symposium, Vol 2, Pages 1289-1292, May 2001 https://doi.org/10.1109/MWSYM.2001.967129
  34. R Mernyei, R Darrer, M Pardoen, and A Sibrai, Reducing the substrate losses of RF integrated inductors, IEEE MIcrowave and Guided Wave Letters, Vol 8, Pages 300-301, Sept 1998 https://doi.org/10.1109/75.720461
  35. J N Burghartz, Progress in RF inductors on Silicon-Understanding Substrate Losses, Digest of IEEE lnternational Electron Devices Meeting, Pages 523-526, Dec 1998 https://doi.org/10.1109/IEDM.1998.746412
  36. K T Chan, C H Huang, A Chin, M F Li, Dim-Lee Kwong, S P McAlister, D S Duh, and W J Lin, Large Q-factor improvement for spiral inductors on silicon using proton implantation, IEEE Microwave and Wireless Components Letters, Vol 13, Pages 460-462, Nov 2003 https://doi.org/10.1109/LMWC.2003.819383
  37. Jun-Bo Yoon, Yun-Seok Choi, Byeong-Il Kim, Yunseong Eo, and Euisik Yoon, CMOS-compatible surface-nucromachined suspended-spiral inductors for multi-GHz silicon RF ICs, IEEE Electron Device Letters, Vol 23, Pages 591-593, Oct 2002 https://doi.org/10.1109/LED.2002.803767
  38. Liang-Hung Lu, G E Ponchak, P Bhattacharya and L P B Katehi, High-Q X-band and K-band Micromachined Spiral inductors for use in Si-based integrated circuits, Digest of Silicon Monolithic Integrated Circuits in RF Systems, Pages 108-112, April 2002 https://doi.org/10.1109/SMIC.2000.844310
  39. H Yoshida, H Suzuki, Y Kinoshita, H Fujii, and T Yamazaki, An RF BiCMOS process using high $f_{SR}$ spiral inductor withpremetal deep trenches and a dual recessed bipolar collector sink, IEEE International Electron Devices Meeting, Pages 213-216, Dec 1998 https://doi.org/10.1109/IEDM.1998.746328
  40. Ju-Ho Son, Sun-Hong Kim, Seok-Woo Choi, Do-Hwan Rho, and Dong-Yong Kim, Multilevel monolithic 3D inductors on silicon, Proc IEEE Midwest Circuits and Systems Symposium, Vol 2, Pages 854-857, Aug 2001 https://doi.org/10.1109/MWSCAS.2001.986321
  41. D C Edelstein and J N Burghartz, Spiral and solenoidal inductor structures on silicon using Cu-damascene interconnects, Proc IEEE Interconnect Technology Conference, Pages 18-20, June 1998 https://doi.org/10.1109/IITC.1998.704740
  42. Young-Jun Kim and M G Allen, Integrated solenoid-type inductors for high frequency applications and their characteristics, IEEE Electronic Components and Technology Conference, Pages 1247-1252, May 1998 https://doi.org/10.1109/ECTC.1998.678896
  43. Jun Zou, Chang Liu, D R Trainor, J Chen, J E Schutt-Aine, and P L Chapman, Development of three-dimensional inductors using plastic deformation magnetic assembly (PDMA), IEEE Trans Microwave Theory and Techniques, Vol 51, Pages 1067- 1075, 2003 https://doi.org/10.1109/TMTT.2003.809674
  44. J N Burghartz, M Soyuer, and K A Jenkins, Microwave inductors and capacitors in standard multilevel interconnect silicon technology, IEEE Trans Microwave Theory and Techniques, Vol 44, Pages 100-104, 1996 https://doi.org/10.1109/22.481391
  45. L F Tiemeijer, D Leenaerts, N Pavlovic, and R J Havens, Record Q spiral inductors in standard CMOS, IEEE International Electron Devices Meeting, Pages 40.7.1-40.7.3, Dec 2001 https://doi.org/10.1109/IEDM.2001.979674
  46. John R Long and Miles A Copeland, The Modeling, Characterization, and Design of Monolithic Inductors for Silicon RF IC's, IEEE Journal of Solid-State Circuits, Vol 32, March 1997 https://doi.org/10.1109/4.557634
  47. Jose M Lopez-Villegas, Josep Samitier, Charles Cane, Pere Losantos, and Joan Bausells, Improvement of the quality factor of RF integrated Inductors by Layout Optimization, IEEE Transactions on Microwave Theory and Techniques, Vol 48, January 2000 https://doi.org/10.1109/22.817474
  48. H Feng, G Jelodin, K Gong, R Zhan, Q Wu, C Chen, and A Wang, Super compact RFIC inductors in 0.18${\mu}m$ CMOS with copper interconnects, IEEE RadIo Frequency Integrated Circuits Symposium, Pages 443-446, June 2002 https://doi.org/10.1109/RFIC.2002.1012087
  49. Chih-Chun Tang, Chia-Hsin Wu, and Shen-Iuan Liu, Miniature 3-D inductors in standard CMOS process, IEEE Journal of Solid-State Circuits, Vol 37, Pages 471-480, 2002 https://doi.org/10.1109/4.991385
  50. Ban-Leong Ooi, Dao-Xian Xu, and Pang-Shyan Kooi, A comprehensive explanation on the high quality characteristic of symmetrical octagonal spiral inductor, IEEE Radio Frequency Integrated Circuits Symposium, Pages 259-262, June 2003
  51. Sang-Gug Lee, Gook-Ju Ihm, and Won-Chul Son, Design and analysis of symmetric dual-layer spiral inductors for RF integrated circuits, IEEE Asia Pacific Conference, Pages 5-8, 1999 https://doi.org/10.1109/APASIC.1999.824011
  52. Feng Ling, Jiming Song, Telesphor Kamgaing, Yingying Yang, William Blood, Michael Petras, and Thomas Myers, Systematic analysis of inductors on silicon using EM simulations, Electronic Components and Technology Conference, 2002 https://doi.org/10.1109/ECTC.2002.1008140