Journal of the Korean Society of Manufacturing Process Engineers (한국기계가공학회지)
- Volume 3 Issue 3
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- Pages.52-57
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- 2004
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- 1598-6721(pISSN)
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- 2288-0771(eISSN)
A Study on the Characteristics of Electro-Polishing and Utility Materials for Gas Transitting
Gas 이송용 Utility Materials의 전해연마 특성에 관한 연구
- Published : 2004.09.30
Abstract
Many kinds of gases, such as erosion gas, dilution gas, and toxic gas have been used in manufacturing process of LCD at semiconductor. In order to increase accumulation rate of manufacturing process, high degree of purity in these gases and minimized metalllic dust are required. All wetted stainless steel surface must be 316L electro-polished with
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