Journal of Korean Ophthalmic Optics Society (한국안광학회지)
- Volume 9 Issue 1
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- Pages.161-166
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- 2004
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- 1226-5012(pISSN)
Characteristics of TiN Films by ion Beam Assisted Deposition
이온빔 보조 증착에 의한 TiN 박막의 특성
- Kim, Sang Hyun (Department of Physics, SungKyunKwan University) ;
- Kim, Dae Hyeon (Department of ophthalmic optic, Dongnam Health College)
- Received : 2004.02.28
- Published : 2004.04.24
Abstract
In this research, TiN films has been grown to the stainless steel substrate by ion beam assisted deposition. TiN film was grown to the nitrogen atmosphere of around
본 연구에서는 이온빔 증착방법을 사용하여 스테인레스 스틸 기판 위에 TiN 박막을 성장하였다.