Vaccum Coating Synthesis and Characterization of the CdSe Nanostructures as a Semiconductor

화합물 반도체 CdSe 나노구조의 진공 코팅합성과 특성

  • Published : 2004.01.01

Abstract

In order to find the optical properties of CdSe thin film and CdSe nanostructure, the following experiments were performed: the CdSe wurtzite nanostructure was made by using 99.99% CdSe (Aldrich) powder with the $SiO_x$ substrates and the $AlO_x$ membranes in $7{\times}10^{-6}$ torr vacuum. (The average vacuum coating speed being 1 ${\AA}$/sec). The calculations obtained were about 200 nm diameter of nanotubes on the $AlO_x$ membranes and a crystallite size of about 2 nm on the $SiO_x$ substrates. These results were verified through the Scanning Electron Microscopy (SEM) analysis, thin film X-ray diffraction analysis and emission spectroscopy.

CaSe wurtzite 구조를 갖는 박막과 나노구조의 광특성을 조사하기 위하여, 99.99% CdSe 분말(Aldrich)을 $7{\times}10^{-6}$ torr 진공상태에서 $SiO_x$ 기판과 다공성 $AlO_x$ 형판 위에 평균 증착속도 1 ${\AA}$/sec로 증착하였다. 주사 전자현미경 분석법(SEM) 및 박막 X-선 회절분석법과 형광분석법에 의해서 확인한 결과, $AlO_x$ 형판을 주형으로 사용하여 얻은 CdSe 튜브의 직경은 약 200 nm이었고, $SiO_x$ 기판위에 형성된 CdSe 박막의 결정립의 크기는 약 2 nm이었으며 형광특성 실험결과와 일치하였다.

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