Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)
- Volume 3 Issue 2
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- Pages.1-4
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- 2004
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- 1738-2270(pISSN)
An Experimental Study on Optimal Condition of Aerodynamic Lens in the Modified ISPM
개선형 ISPM에서 공기역학적 렌즈의 최적조건에 대한 실험적 연구
Abstract
An experimental study was conducted on the optimal configuration and size of ADFL(Aerodynamic Focusing Lens) which used in modified ISPM(In-Situ Particle Monitoring). The particle counting efficiency has been known as a function of distance and size of ADFL, thus we varied these parameters to find out the optimum values. From a result of experiment, it was found that two lenses and 6mm space between them showed a maximum particle measuring efficiency. To apply this modified ISPM to semiconductor manufacturing field, we need more experiment about the pressure change, flow rate, and input particle size.
Keywords
- In-Situ Particle Monitoring(ISPM);
- Aerodynamic Focusing Lens(ADFL);
- Thin Plate Orifice;
- Sensing Volume