Journal of the Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회논문지)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
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A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

결정성 질화탄소막의 습도 감지특성에 관한 연구

  • 이지공 (경남대학교 전기전자공학부) ;
  • 하세근 (경남대학교 전기전자공학) ;
  • 김정훈 (경남대학교 전기전자공학) ;
  • 이성필 (경남대학교 전기전자공학부)
  • Published : 2004.05.01
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Abstract

Crystalline carbon nitride films were attempted for an application of humidity sensors. The films were deposited on $Al_2$O$_3$substrate having intermigrated electrodes by reactive rf magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of 10∼95 RH(%). Temperature dependence was also investigated. These results suggest that the carbon nitride film has a possibility for new humidity-sensitive material.

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References

  1. Science v.245 Prediction of new low compressibility solids A.Y.Liu;M.L.Cohen https://doi.org/10.1126/science.245.4920.841
  2. J. Korean Phys. Soc. v.39 Effect of hydrogen on carbon nitride film deposition S.P.Lee;J.B.Kang;S.Chowdhury
  3. Wear v.254 Humidity effect on the critical number of friction cycles for wear particle generation in carbon nitride coatings D.F.Wang;K.Kato https://doi.org/10.1016/S0043-1648(02)00298-3
  4. Sensors and Actuators v.10 Humidity sensors: principles and application N.Yamazoe;Y.Shimizu https://doi.org/10.1016/0250-6874(86)80055-5
  5. Proc. of the 2nd IMCS A capacitive humidity sensors with very fast response time and very low hysteresis H.Grange;C.Bieth;H.Boucher;G.Delapierre
  6. Sensors and Actuators v.4 A thin-film resistance humidity sensor M.Hijikigawa;S.Miydshi;T.Sugihara;A.Jinda https://doi.org/10.1016/0250-6874(83)85038-0
  7. IEEE v.ED-33 no.4 resonant-microbridge vapor sensor R.T.Howe;R.S.Muller
  8. Sensors and Actuators v.35-36 Humidity sensitive field effect transistors S.P.Lee;K.J.Park
  9. J. Am. Cer. Soc. v.13 Humidity-sensitive electrical conduction of MgCr₂O₄-TiO₂ porous ceramics T.Nitta;Z.Terada;S.Hayagawa
  10. Sensors and Actuators v.13 Humidity-sensitive and water-resistive polymeric materials Y.Sakai;Y.Sadaoka;Jukumoto https://doi.org/10.1016/0250-6874(88)85004-2
  11. 전기전자재료학회논문지 v.15 no.2 반응성 스퍼터링으로 성장된 결정성 질화탄소막의 기계적 특성 이성필;강종봉 https://doi.org/10.4313/JKEM.2002.15.2.147
  12. 전기전자재료학회지 v.4 no.1 반응성 스퍼터링으로 성장된 결정성 질화탄소막의 결정성 분석 이지공;하세근;이성필
  13. 전기전자재료학회논문지 v.16 no.12 기판과 성장조건에 따른 질화 탄소막의 결정성장 특성 이지공;이성필
  14. 3rd International Conference on Advanced Materials and Devices Nanostructured carbon nitride films for fumidity sensor application 이지공;이성필

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