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A Study on the Humidity Sensing Properties of Crystalline Carbon Nitride Films

결정성 질화탄소막의 습도 감지특성에 관한 연구

  • 이지공 (경남대학교 전기전자공학부) ;
  • 하세근 (경남대학교 전기전자공학) ;
  • 김정훈 (경남대학교 전기전자공학) ;
  • 이성필 (경남대학교 전기전자공학부)
  • Published : 2004.05.01

Abstract

Crystalline carbon nitride films were attempted for an application of humidity sensors. The films were deposited on $Al_2$O$_3$substrate having intermigrated electrodes by reactive rf magnetron sputtering system. The film revealed a good humidity-resistance characteristics as well as humidity-capacitance ones in the humidity range of 10∼95 RH(%). Temperature dependence was also investigated. These results suggest that the carbon nitride film has a possibility for new humidity-sensitive material.

Keywords

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  1. Optical, mechanical and etch properties of amorphous carbon nitride films grown by plasma enhanced chemical vapor deposition at room temperature vol.160, pp.23-24, 2010, https://doi.org/10.1016/j.synthmet.2010.09.024