반도체디스플레이기술학회지 (Journal of the Semiconductor & Display Technology)
- 제2권3호
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- Pages.31-36
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- 2003
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- 1738-2270(pISSN)
Wafer 반송용 End-Effector의 FEM 해석 및 파지력 제어에 관한 연구
A Study on the FEM Analysis and Gripping Force Control of End-Effector for the Wafer Handling Robot System
초록
On this study, an E.E(End-Effector) for the 300 mm wafer transfer robot system is newly suggested. It is a mechanical type with
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