Transactions of the Korean Society of Mechanical Engineers B (대한기계학회논문집B)

The Korean Society of Mechanical Engineers (대한기계학회)
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Calibration and Uncertainty Measurement of Differential Mobility Analyzer Using 100 nm NIST SRM 1963

100 nm NIST 표준입자를 이용한 미분형 전기 이동도 분석기의 교정 및 불확실도 측정

  • 이상진 (한양대학교 대학원 기계공학과) ;
  • 안진홍 (한양대학교 대학원 기계공학과) ;
  • 안강호 (한양대학교 기계공학과)
  • Published : 2003.12.01
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Abstract

House made differential mobility analyzer(DMA) is calibrated with NIST SRM 1691(300 nm PSL). Then the particle size and uncertainty for differential mobility analyzer(DMA) using the NIST SRM 1963(100 nm PSL). In result, calibration of prototype DMA is measured using 300 nm NIST SRM 1691, then sheath air flow was corrected 126.67 ㎤/s. Corrected sheath air flow is used in uncertainty measurement of prototype DMA. Uncertainty analysis is performed using NIST SRM 1963(100 nm PSL). The experimental result shows that NIST SRM 1963 is measured as 102.17 nm with a type A uncertainty of 0.33 nm.

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References

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