한국전기전자재료학회논문지 (Journal of the Korean Institute of Electrical and Electronic Material Engineers)

  • 제16권11호
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  • Pages.1019-1022
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  • 2003
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  • 1226-7945(pISSN)
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  • 2288-3258(eISSN)
한국전기전자재료학회 (The Korean Institute of Electrical and Electronic Material Engineers)
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바이어스 조건하에서 증착한 a-C:H 박막을 이용한 액정배향 효과

LC Alignment Effects using a-C:H Thin Film as Working Gas at Bias Condition

  • 황정연 (연세대학교 전기전자공학과) ;
  • 조용민 (연세대학교 전기전자공학과) ;
  • 서대식 (연세대학교 전기전자공학과) ;
  • 노순준 (연세대학교 재료공학부) ;
  • 백홍구 (연세대학교 재료공학부)
  • 발행 : 2003.11.01
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초록

We studied the nematic liquid crystal (NLC) aligning capabilities using the new alignment material of a-C:H thin film as working gas at 30W rf bias condition. A high pretilt angle of about 5$^{\circ}$ by ion beam(IB) exposure on the a-C:H thin film surface was measured. A good LC alignment by the IB alignment method on the a-C:H thin film surface was observed at annealing temperature of 250$^{\circ}C$, and the alignment defect of the NLC was observed above annealing temperature of 300$^{\circ}C$. Consequently, the high LC pretilt angle and the good thermal stability of LC alignment by the IB alignment method on the a-C:H thin film surface as working gas at 30W rf bias condition can be achieved.

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참고문헌

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