DOI QR코드

DOI QR Code

비접촉식 평면구동기의 동특성해석

Dynamic Analysis of the Contact-free Surface Actuator

  • 이상헌 (연세대학교 대학원 기계공학과) ;
  • 백윤수 (연세대학교 대학원 기계공학과)
  • 발행 : 2003.09.01

초록

As the micro-technologies in the high precision manufacturing processes are developed, the demand for micro actuating device is increasing. But, it is difficult to achieve high resolution and wide operating range simultaneously with the conventional actuating systems which are contacting and type of dual servo system. So, the contact-free surface actuators whose movers are suspended or levitated were proposed. These systems can be applied to high precision stages and alignment apparatuses. The suspended mover can be assumed to be rigid body, but the mover is a structure in this study, therefore the vibration caused during the operating process has a serious adverse effect on the performance and it is very important to identify the vibrational characteristics. In this paper, a contact-free surface actuator is modeled in finite element method and updated by using the experimental modal data. Finally, the static and dynamic characteristics of the finite element model are predicted and then discussed.

키워드

참고문헌

  1. 대한기계학회논문집 A권 v.26 no.3 자기 흡인식 부상 원리에 기초한 비접촉식 서피스 액추에이터의 초정밀 범용 스테이지에의 적용 가능성 정광석;이상헌;백윤수 https://doi.org/10.3795/KSME-A.2002.26.3.452
  2. モ一ド解折 長松昭男
  3. 한국소음진동공학회논문집 v.8 no.4 항공기 지상진동 시험 및 동특성 모델의 개선 유흥주;변관화;박금룡
  4. Electromagnetic Levitation and Suspension Tecniques Jayawant,B.V.
  5. Journal of Dynamic Systems, Measurement and Control v.117 Study on a Surface-motor Driven Precise Positioning System Yoshiyuki Tomita;Yasushi Koyanagawa https://doi.org/10.1115/1.2799121
  6. ANSYS Structural Analysis Guide Release 5.5 ANSYS, Inc.