Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

Volume 16 Issue 9
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Pages.61.3-62
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2003
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2982-6268(pISSN)
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2982-6306(eISSN)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)

권호 표지

High-k dielectrics by UV photo-assisted chemical vapour deposition

Fang, Q. (Dept. Electronic ＆ Electrical Engineering, University College London) ;
Zhang, J.Y. (Dept. Electronic ＆ Electrical Engineering, University College London) ;
Wang, Z.M. (Dept. Electronic ＆ Electrical Engineering, University College London) ;
He, G. (Dept. Electronic ＆ Electrical Engineering, University College London) ;
Yu, J. (Dept. Electronic ＆ Electrical Engineering, University College London) ;
Boyd, Ian W. (Dept. Electronic ＆ Electrical Engineering, University College London)

Published : 2003.09.01

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Abstract

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