한국정밀공학회지 (Journal of the Korean Society for Precision Engineering)

  • 제20권9호
  • /
  • Pages.47-54
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  • 2003
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  • 1225-9071(pISSN)
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  • 2287-8769(eISSN)
한국정밀공학회 (Korean Society for Precision Engineering)
권호 표지

나노인덴테이션 공정을 이용하여 극미세 패턴을 제작하기 위한 나노변형의 유한요소해석(II)

Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nanoidentation Process (II)

  • 이정우 (부산대학교 정밀기계공학과) ;
  • 윤성원 (부산대학교 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
  • 발행 : 2003.09.01
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초록

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

키워드

참고문헌

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