Journal of the Korean Society for Precision Engineering (한국정밀공학회지)

Korean Society for Precision Engineering (한국정밀공학회)
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Finite Element Analysis of Nano Deformation for Hyper-fine Pattern Fabrication by Application of Nanoidentation Process (II)

나노인덴테이션 공정을 이용하여 극미세 패턴을 제작하기 위한 나노변형의 유한요소해석(II)

  • 이정우 (부산대학교 정밀기계공학과) ;
  • 윤성원 (부산대학교 정밀기계공학과) ;
  • 강충길 (부산대학교 기계공학부, 정밀정형 및 금형가공연구소)
  • Published : 2003.09.01
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Abstract

In this study, to achieve the optimal conditions for mechanical hyper-fine pattern fabrication process, deformation behavior of the materials during indentation was studied with numerical method by ABAQUS S/W. Polymer (PMMA) and brittle materials (Si, Pyrex glass) were used as specimens, and forming conditions to reduce the elastic re cover and pile-up were proposed. The indenter was modeled a rigid surface. Minimum mesh sizes of specimens are 1 -l0nm. Comparison between the experimental data and numerical result demonstrated that the finite element approach is capable of reproducing the loading-unloading behavior of a nanoindentation test. The result of the investigation will be applied to the fabrication of the hyper-fine pattern.

Keywords

References

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