Effect of Plasma Etching and $PdCl_2/SnCl_2$ Catalyzation on the Performance of Electroless Plated Copper Layer

플라즈마 에칭 및 $PdCl_2/SnCl_2$ 촉매조건이 무전해 동도금 피막의 성능에 미치는 영향

  • 오경화 (중앙대학교 가정교육학과) ;
  • 김동준 (한양대학교 섬유고분자공학과 기능성고분자신소재 연구센타) ;
  • 김성훈 (한양대학교 섬유고분자공학과 기능성고분자신소재 연구센타)
  • Published : 2003.07.01

Abstract

Cu/PET film composites were prepared by electroless copper plating method. In order to improve adhesion between electroless plated Cu layer and polyester (PET) film, the effect of pretreatment conditions such as etching method, mixed catalyst composition were investigated. Chemical etching and plasma treatment increased surface roughness in decreasing order of Ar>HCl>O$_2$>NH$_3$. However, adhesion of Cu layer on PET film increased in the following order: $O_2$<Ar<HCl<NH$_3$. It indicated that appropriate surface roughness and introduction of affinitive functional group with Pd were key factors of improving adhesion of Cu layer. PET film was more finely etched by HCI tolution, resulting in an improvement in adhesion between Cu layer and PET film. Plasma treatment with NH$_3$produced nitrogen atoms on PET film, which enhances chemisorption of Pd$^{2+}$ on PET film, resulting in improved adhesion and shielding effectiveness of Cu layer deposited on the Pd catalyzed surface. Surface morphology of Cu plated PET film revealed that Pd/Sn colloidal particles became more evenly distributed in the smaller size by increasing the molar ratio of PdCl$_2$; SnCl$_2$from 1 : 4 to 1 : 16. With increasing the molar ratio of mixed catalyst, adhesion and shielding effectiveness of Cu plated PET film were increased.d.

Keywords

References

  1. 한국재료학회지 v.9 no.11 전도성 금속 피복재의 전기 전도도에 의한 전자파 차폐효과 분석 김영식;최익권;김성수
  2. Polymer(Korea) v.25 no.2 무전해 동도금 피막의 접착력향상에 관한 연구 오경화;김동준;김성훈
  3. 한국의류학회지 v.23 no.5 시판 전자기파 차단 직물의 차폐효과 및 물성 한은경;오경화;김은애
  4. Applied surface Science v.69 no.1-4 Laser-induced surface modification and structure formation of polymers Arenolz,E.;Heitz,J.;Wagner,M.;Baeuerle,D.;Hibst,H.;Hagemeyer,A. https://doi.org/10.1016/0169-4332(93)90475-Q
  5. Journal of Electrochemical Society v.143 no.2 Plasma treatment process for palladium chemisorption onto polymers before electroless desorption Charbonnier,M.;Alami,M.;Romand,M. https://doi.org/10.1149/1.1836467
  6. Macromolecules v.31 no.11 Chemical curface modification of poly (ethylene terephthalate) Chen,W.;McCarthy,T.J. https://doi.org/10.1021/ma9710601
  7. Journal of Electrochemical Society v.146 no.2 Local deposition of Ni-pally on aluminium by laser irradiation and electroless plating Chu,S.Z.;Sakairi,M.;Takahashi,H.;Qiu,Z.X. https://doi.org/10.1149/1.1391640
  8. Journal of Electrochemical Society v.120 no.4 Generative and stabilizing process in tin-palladium sols and palladium sol sensitizers Cohen,R.L.;West,K.W. https://doi.org/10.1149/1.2403486
  9. Macromolecules v.25 no.1 Surface physical interpenetrating networks of poly(ethylene terephthalate) and poly(ethylene oxide) with biomedical applications Desai,N.P.;Hubbell,J.A. https://doi.org/10.1021/ma00027a038
  10. Surface Science Surface modifications of polycarbonate (PC) and polyethylene terephtalate (PET) by cold remote nitrogen plasma Jama,C.;Dessaux,O.;Goudmand,P.;Mutel,B.;Gengembre,L.;Drevillon,B.;Grimblot,J.
  11. Journal of Applied Physics v.87 no.9 Effects of catalyst accelerator on electromagnetic shielding in nonelectrolytic Cu-plated fabrics Kim,E.A.;Han,E.G.;Oh,K.W.;Na,G.J. https://doi.org/10.1063/1.373223
  12. Journal of Electrochemical Science and Technolgy v.127 no.5 A study on activation and acceleration by mixed PdCl₂/SnCl₂catalysts for electroless metal deposition Osaka,T.;Takamatsu,H. https://doi.org/10.1149/1.2129810
  13. Jorunal of Electrochemical Society v.145 no.10 Formation of catalytic pd on ZnO thin films for electroless metal deposition Sun,R.D.;Tryk,D.A.;Hashimoto,K.;Fujishima,A. https://doi.org/10.1149/1.1838815
  14. Journal of Applied Polymer Science v.41 no.7/8 Surface modification by continuous graft copolymerization.Ⅲ.Photoinitiated graft copolymerization onto poly(ethlene Terephthalate) fiber Surface Yao,Z.P.;Randy,B. https://doi.org/10.1002/app.1990.070410709
  15. Surface Interface Analysis v.28 no.1 Investigation of the surface structures and dynamics of polyethylene terephtalate(PET) modified by fluorocarbon plasmas Zhang,L.;Chin,W.S.;Huang,W.;Wang,J.Q. https://doi.org/10.1002/(SICI)1096-9918(199908)28:1<16::AID-SIA612>3.0.CO;2-9