Tribology and Lubricants

  • 제19권2호
  • /
  • Pages.109-115
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  • 2003
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  • 2713-8011(pISSN)
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  • 2713-802X(eISSN)
한국트라이볼로지학회 (Korean Tribology Society)
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SPM을 이용한 Si 표면위에 플라즈마 처리된 소수성 박막의 나노 트라이볼로지적 특성 연구

Nanotribological Characteristics of Plasma Treated Hydrophobic Thin Films on Silicon Surfaces using SPM

  • 윤의성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 양승호 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 공호성 (한국과학기술연구원 트라이볼로지 연구센터) ;
  • 고석근 (한국과학기술연구원 박막기술 연구센터)
  • 발행 : 2003.04.01
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초록

Nanotribological characteristics between a Si$_3$N$_4$ AFM tip and hydrophobic thin films were experimentally studied. Tests were performed to measure the nano adhesion and friction in both AFM (atomic force microscope) and LFM (lateral force microscope) modes in various .ranges of normal load. Plasma-modified thin polymeric films were deposited on Si-wafer (100). Results showed that wetting angle of plasma-modified thin polymeric film increased with the treating time, which resulted in the hydrophobic surface and the decrease of adhesion and friction. Nanotribological characteristics of these surfaces were compared with those of other hydrophobic surfaces, such as DLC, OTS and IBAD-Ag coated surfaces. Those of OTS coated surface were superior to those of others, though wetting angle of plasma-modified thin polymeric film is higher.

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참고문헌

  1. Proc. IEEE Micro Electro Mechanical Systems IC-Processed Micro-Motors: Design, Technology and Testing Tai,Y.C.;Fan,L.S.;Muller,R.S.
  2. Tribology and Mechanics of Magnetic Storage Devices(2nd ed.) Bhushan,B.
  3. Tribology Letters v.4 Contact Mechanics of Rough Surfaces in Tribology : Multiple Asperity Contact Bhushan,B. https://doi.org/10.1023/A:1019186601445
  4. Proc. MEMS 95 Performance Impact of Monolayer Coatings of Polusilicon Micromotors Deng,K.;Collins,R.J.;Mehregany,M.;Sukenik,C.N.
  5. Sensors and Actuators A v.57 Friction and Pull-off Force on Silicon Surface Modified by FIB Ando,Y.;Ino,J. https://doi.org/10.1016/S0924-4247(97)80098-2
  6. Journal of Tribology v.119 The Effect of Asperity Array Geometry on Friction and Pull-off Force Ando,Y.;Ino,J. https://doi.org/10.1115/1.2833885
  7. Wear v.238 Micro-Wear Properties of Carbon Nitride Coatings Kato,K.;Koide,H.;Umehara,N. https://doi.org/10.1016/S0043-1648(99)00338-5
  8. Thin Solid Films v.371 The Mechanical Stability of Langmuir-Blodgett Multilayers Girnard,K.P.;Quinn,J.A.;Vanderlick,T.K. https://doi.org/10.1016/S0040-6090(00)00969-X
  9. Sensors and Actuators A : Physical v.82 Selfassembled Monolayers as Anti-stiction Coatings for MEMS : Characteristics and Recent Dvelopments Maboudian,R.;Ashurst,W.;Carraro,C. https://doi.org/10.1016/S0924-4247(99)00337-4
  10. 한국윤활학회지 v.17 no.3 SPM을 이용한 접촉조건 변화에 따른 미소응착 특성 연구 윤의성;박지현;양승호;공호성
  11. 한국윤활학회지 v.17 no.4 OTS SAM의 미소응착 특성에 관한 실험적 연구 윤의성;박지현;양승호;한흥구;공호성
  12. 한국윤활학회지 v.18 no.1 IBAD로 표면개질된 실리콘 표면의 나노 트라이볼로지적 특성 윤의성;박지현;양승호;공호성;장경영
  13. Metallized Plastics 7: Fundamental and Applied Aspects Metallization of polymers modified by ion-assisted reaction(IAR) Koh,S.K.;Cho,J.S.;Han,S.;Kim,K.H.;Cho,J.;Han,Y.G.;Baeg,Y.H.