Li$_2$CO$_3$, doped ZnO films prepared by RF magnetron sputtering technique for acoustic device application

  • Walter Water (Department of Electrical Engineering, National Cheng Kung University) ;
  • Chu, Sheng-Yuan (Department of Electrical Engineering, National Cheng Kung University) ;
  • Juang, Yung-Der (Tainan Teachers College, Tainan, Taiwan) ;
  • Wu, Shih-Jeh (Department of Mechanical Engineering, I-Shou University)
  • Published : 2003.01.01