Electrical & Electronic Materials (E2M - 전기 전자와 첨단 소재)

The Korean Institute of Electrical and Electronic Material Engineers (한국전기전자재료학회)
권호 표지

Piezoelectric thin AIN films for bulk acoustic wave (BAW) resonators

  • Loebl, H.P. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
  • Klee, M. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
  • Metzmacher, C. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
  • Brand, W. (Philips Research Laboratories, Weisshausstrasse 2, D-52066 Aachen, Germany) ;
  • Milsom, R. (Philips Research Laboratories, Cross Oak Lane, Redhill, Surrey RHI 5HA, UK) ;
  • Lok, P. (Philips Semiconductors, MSI, Gerstweg2, NL-6534 AE Nijmegen, The Netherlands)
  • Published : 2003.01.01
Download PDF
⟨ Previous Next ⟩

Abstract

Keywords