Bulletin of the Korean Chemical Society

Korean Chemical Society (대한화학회)
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Additive Fabrication of Patterned Multi-Layered Thin Films of Ta2O5 and CdS on ITO Using Microcontact Printing Technique

  • Lee, Jong-Hyeon (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University) ;
  • Woo, Soo-Yeun (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University) ;
  • Kwon, Young-Uk (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University) ;
  • Jung, Duk-Young (Department of Chemistry and Bk21-School of Molecular Science, Sungkyunkwan University)
  • Published : 2003.02.20
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Abstract

The micro-patterning of multi-layered thin films containing CdS and $Ta_2O_5$ layers on ITO substrate with various structures was successfully obtained by combining three different techniques: chemical solution depositions, sol-gel, and microcontact printing (μCP) methods using octadecyltrichlorosilane (OTS) as the organic thin layer template. $Ta_2O_5$ layer was prepared by sol-gel casting and CdS one obtained by chemical solution deposition, respectively. Parallel and cross patterns of multi-layers with $Ta_2O_5$ and CdS films were fabricated additively by successive removal of OTS layer pre-formed. This study presents the designed architectures consisting of the two types of feature having horizontal dimensions of 170 ㎛ and 340 ㎛ with constant thickness ca. 150 nm of each deposited materials. The thin film lay-out of the cross-patterning is composed of four regions with chemically different layer compositions, which are confirmed by Auger electron microanalysis.

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References

  1. Ozin, G. A. Adv. Mater. 1991, 4, 612. https://doi.org/10.1002/adma.19920041003
  2. Stix, G. Sci. Am. 1995, 272, 90.
  3. Qin, D.; Xia, Y.; Whitesides, G. M. Adv. Mater. 1997, 9, 407. https://doi.org/10.1002/adma.19970090509
  4. Xia, Y.; Rogers, J. A.; Paul, K. E.; Whitesides, G. M. Chem. Rev. 1999, 99, 1823 https://doi.org/10.1021/cr980002q
  5. Rogers, J. A.; Jackman, R. J.; Whitesides, G. M.; Olson, D. L.; Sweddler, J. V. Appl. Phys. Lett. 1997, 70, 2464. https://doi.org/10.1063/1.118857
  6. Kumar, A.; Biebuyck, H. A.; Abbott, N. L.; Whitesides, G. M. J. Am. Chem. Soc. 1992, 114, 9188. https://doi.org/10.1021/ja00049a061
  7. Wilbur, J. L.; Kumar, A.; Kim, E.; Whitesides, G. M. Adv. Mater. 1994, 6, 600. https://doi.org/10.1002/adma.19940060719
  8. Jeon, N. L.; Clem, P.; Jung, D. Y.; Lin, W.; Girolami, G. S.; Payne, D. A.; Nuzzo, R. N. Adv. Mater. 1997, 9, 891. https://doi.org/10.1002/adma.19970091107
  9. Calvert, J. M. In Lithographically Patterned Self-Assembled Films; Ulman, A., Ed.; Academic: San Diego, 1993; Vol. 20, p 109.
  10. Jeon, N. L.; Nuzzo, R. G.; Xia, Y.; Mrksich, M.; Whitesides, G. M. Langmuir 1995, 11, 3024. https://doi.org/10.1021/la00008a029
  11. Jeon, N. L.; Clem, P. G.; Payne, D. A.; Nuzzo, R. G. Langmuir 1996, 12, 5350. https://doi.org/10.1021/la960377b
  12. Jeon, N. L.; Lin, W.; Girolami, G. S.; Nuzzo, R. G. Langmuir 1997, 13, 3833 https://doi.org/10.1021/la970167e
  13. Jeon, N. L.; Clem, P. G.; Payne, D. A.; Nuzzo, R. G. J. Mater. Res. 1995, 10, 2996. https://doi.org/10.1557/JMR.1995.2996
  14. Clem, P. G.; Jeon, N. L.; Nuzzo, R. G.; Payne, D. A. J. Am. Ceram. Soc. 1997, 80, 2821. https://doi.org/10.1111/j.1151-2916.1997.tb03199.x
  15. Jung, D. Y.; Payne, D. A. Bull. Korean Chem. Soc. 1999, 20, 824.
  16. Hwang, Y. K.; Woo, S. Y.; Lee, J. H.; Jung, D. Y.; Kwon, Y. U. Chem. Mater. 2000, 12, 2059. https://doi.org/10.1021/cm000304k
  17. Ha, K.; Lee, Y. J.; Jung, D. Y.; Lee, J. H.; Yoon, K. B. Adv. Mater. 2000, 12, 1614. https://doi.org/10.1002/1521-4095(200011)12:21<1614::AID-ADMA1614>3.0.CO;2-H
  18. Wilbur, J. L.; Kumar, A.; Biebuyck, H. A.; Kim, E.; Whitesides, G. M. Nanotechnology 1996, 7, 452. https://doi.org/10.1088/0957-4484/7/4/028
  19. Xia, Y.; Whitesides, G. M. Angew. Chem. 1998, 37, 550. https://doi.org/10.1002/(SICI)1521-3773(19980316)37:5<550::AID-ANIE550>3.0.CO;2-G
  20. Lee, J. H.; Jung, D. Y. IUMRS 6th International Conference in Asia, 2000.
  21. Kylner, A.; Lindgren, J.; Stolt, L. J. Electrochem. Soc. 1996, 143, 2662. https://doi.org/10.1149/1.1837066
  22. Kylner, A.; Wirde, M. Jpn. J. Appl. Phys. 1997, 36, 2167. https://doi.org/10.1143/JJAP.36.2167
  23. Niles, D. W.; Herft, G.; Al-Jassim, M. J. Appl. Phys. 1997, 81, 1978. https://doi.org/10.1063/1.364054
  24. Weber, M.; Krauser, J.; Weidinger, A.; Bruns, J.; Fischer, C.-H.; Bohne, W.; Rohrich, J.; Scheer, R. J. Electrochem. Soc. 1999, 146, 2131. https://doi.org/10.1149/1.1391903

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