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Design and Fabrication of Micro Combustor (III) - Fabrication of Micro Engine by Photosensitive Class -

미세 연소기 개발 (III) - 감광 유리를 이용한 마이크로 엔진의 제작 -

  • 이대훈 (한국과학기술원 항공우주공학전공) ;
  • 박대은 (한국과학기술원 전기전자공학전공) ;
  • 윤준보 (한국과학기술원 전기전자공학전공) ;
  • 윤의식 (한국과학기술원 전기전자공학) ;
  • 권세진 (한국과학기술원 항공우주공학전공)
  • Published : 2002.12.01

Abstract

Micro engine that includes Micro scale combustor is fabricated. Design target was focused on the observation of combustion driven actuation in MEMS scale. Combustor design parameters are somewhat less than the size recommended by feasibility test. The engine structure is fabricated by isotropic etching of the photosensitive glass wafers. Electrode formed by electroplating of the Nickel. Photosensitive glass can be etched isotropically with almost vertical angle. Bonding and assembly of structured photosensitive glass wafer form the engine. Combustor size was determined to be 1 mm scale. Movable piston is engraved inside the wafer. Ignition was done by nickel spark plug which was electroplated with thickness of 40 ${\mu}{\textrm}{m}$. The wafers were bonded by epoxy that resists high temperature. In firing test due to the bonding method and design tolerance pressure buildup by reaction was not confirmed. But ignition, flame propagation and actuation of micro structure from the reaction was observed. From the result basement of design and fabrication technology was obtained.

Keywords

References

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