DOI QR코드

DOI QR Code

TFD Device with Symmetrical Structure of Flexible Electrode Subject to Flexible Substrate

  • Lee, Chan-Jae (Information Display Research Center, Korea Electronics Technology Institute) ;
  • Hong, Sung-Jei (Information Display Research Center, Korea Electronics Technology Institute) ;
  • Kim, Won-Keun (Information Display Research Center, Korea Electronics Technology Institute) ;
  • Han, Jeong-In (Information Display Research Center, Korea Electronics Technology Institute)
  • Published : 2002.12.01

Abstract

In this work, we test electrode material of TFD (Thin Film Diode) device subject to flexible substrate. Al, that is ductile metal, was proper for flexible electrode to fabricate flexible display. The fabricated devices had symmetric electrode structure on both sides of insulation layer. The electrode was made of ductile Al so as to reduce the mismatch of properties between the electrode and substrate. The TFD device was successfully fabricated applying our own etch-free process. Electrical properties were improved by post-annealing.

Keywords

References

  1. R. Baeuerle, J. Baumbach, E. Lueder, and J.Siegordner, 'A MIM Dhven Display with Colour filters on 2' Diagonal Plastic Substrates', SID `99Digest, p. 143, 1999
  2. C. J. Lee, S. J. Hong, J. I. Han, and W. K. Kim'Fabhcation of flexible thin film diode devices forplastic film LCD', Proc. 2002 Summer Conf.KIEEME, p. 73, 2002
  3. S. J. Hong, C. J Lee, W. K. Kim, and J. I. Han,'Effect of electrode structure on electricalproperties of thin film diode', Proc. 2002 SummerConf. KIEEME, p. 73, 2002
  4. S. J. Hong, S. K. Park, J. I. Han, W. K. Kim, M. K.Kwak, C. J. Lee, and Y. H. Kim, M. J. Lee, and K. S.Chung, 'High performance MIM devices forplastic film AM-LCD', Asia Display /IDW `01, p.403,2001
  5. Z. Suo, 'Mechanics of rollable and foldable film-on-foil electronics', Appl. Phys. Let., Vol. 74, No.8,p.1177,1999 https://doi.org/10.1063/1.123478
  6. Fukuyama Toshiaki, Matoba Masakazu IshimotoYoshihisa; Kishida Masahiro, YoshimizuToshiyuki, and Seike Takeshi, 'Method of making two terminal nonlinear device and liquidcrystal apparatus including the same', U.S. Patent5, 654, 207,1997
  7. L. Vazquez, I. Montero, and J. M. Albella, 'AFMStudy of the Dielectric Breakdown in Ta_2O_5Films', Chem. Mater., Vol. 7, p. 1680, 1995 https://doi.org/10.1021/cm00057a016
  8. M. J. Lee, K. S. Chung, J. I. Han, W. K. Kim, S. J.Hong, and S. K. Park, 'Effects of postannealing oncurrent-voltage characteristics of metal-insulator(Ta_2O_5)-metal type thin-film diode', J. Kor. Phys.Soc., Vol. 39, No. 4, P. 686,2001