대한기계학회논문집B (Transactions of the Korean Society of Mechanical Engineers B)

  • 제26권10호
  • /
  • Pages.1394-1405
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  • 2002
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  • 1226-4881(pISSN)
  • /
  • 2288-5324(eISSN)
대한기계학회 (The Korean Society of Mechanical Engineers)
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희박기체 상태의 라디오미터릭 효과에 의해 구동되는 선형 마이크로 액추에이터의 성능해석

Performance Analysis of a Linear Micro-actuator Operated by Radiometric Phenomena in Rarefied Gas Flow Field

  • 황영규 (성균관대학교 기계공학부) ;
  • 허중식 (성균관대학교 기계공학부)
  • 발행 : 2002.10.01
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초록

The performance of micro-actuators utilizing radiometric forces are studied numerically. The Knudsen number based on gas density and characteristic dimension is varied from near-continuum to highly rarefied conditions. Direct simulation Monte Carlo(DSMC) calculations have been performed to estimate the performance of the micro-actuators. In the present DSMC method, the variable hard sphere molecular model and no time counter technique are used to simulate the molecular collision kinetics. For simulation of diatomic gas flows, the Borgnakke-Larsen phenomenological model is adopted to redistribute the translational and internal energies.

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참고문헌

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  2. Kennard, E. H., 1938, Kinetic Theory of Gases, McGraw-Hill
  3. Wadsworth, D. C. and Muntz, E. P., 1996, 'A Computational Study of Radiometric Phenomena for Powering Microactuators with Unlimited Displace- ments and Large Available Forces,' J. Microelectro- mechanical Syst., Vol. 5, No. 1, pp. 59-65 https://doi.org/10.1109/84.485217
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  7. Borgnakke, C. and Larsen, P. S., 1975, 'Statistical Collision Model for Monte Carlo Simulation of Polyatomic Gas Mixture,' J. Comput. Phys., Vol. 18, pp. 405-420 https://doi.org/10.1016/0021-9991(75)90094-7